Asml Netherlands B.v.

Mustafa Amhaouch

Franciscus Catharina Bernardus Marinus Van Vroonhoven

Johannes Henricus Wilhelmus Jacobs

Hernes Jacobs

Paulus Martinus Maria Liebregts

Wilhelmus Josephus Box

Antonius Johannes Josephus Van Dijsseldonk

Marius Ravensbergen

Robert Gordon Livesey

Martinus Arnoldus Henricus Terken

Pertrus Rutgerus Bartray

Angelo Alexander Michael Van Engelen

Tim Anton Johan Meesters

A vacuum operated lithographic apparatus includes a vacuum housing for providing a vacuum environment to a support constructed to support a patterning device, or a substrate table, or a projection system, or any combination thereof. An interior of the vacuum housing includes a plurality of transport circuits for transporting fluids and/or electrical signals for use in a first process mode for lithographic processing. At least one of the transport circuits is adapted to transport energy towards the interior of the vacuum housing to stimulate outgassing in the vacuum housing for use in a second process mode for bringing the lithographic apparatus into a vacuum operating condition.

Lithographic apparatus

A lithographic apparatus includes an illumination system for providing a beam of radiation. The lithographic apparatus further includes: a support structure for supporting patterning device, the patterning device serving to impart the beam with a pattern in its cross-section; a substrate table for holding a substrate; and a projection system for projecting the patterned beam onto a target portion of the substrate. The lithographic apparatus includes a vacuum system in which at least the illumination system and the substrate table are present. The vacuum system includes at least two separate vacuum modules. A first vacuum module includes at least the projection system and/or the illumination system. A second vacuum module includes the substrate table. At least two of the vacuum modules are connected to each other via a closable connection.

Lithographic apparatus and method of manufacturing a device and method of performing maintenance

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Helden Panningen, Netherlands

Mustafa Amhaouch