Ulvac, Inc.

Muneyoshi Nishitsuji

Takahiro Yoshino

Hirotoshi Nakao

Daisuke Kawakubo

Kiyotaka Yamada

Taiji Chiba

Takuya Kuriyama

To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same. A drive device includes a frame and an actuator installed in the frame. The frame is formed by integral molding by casting. The frame includes a connecting portion connectable to a division wall of a conveyance chamber, a bottom plate portion serving as an opposed portion provided to be opposed to the connecting portion, and a plurality of coupling portions that couple the connecting portion and the bottom plate portion to each other. The actuator includes three coaxial shafts (two rotating shafts and single turning shaft), three motors, and a transmission mechanism that transmits a rotational driving force by the three motors to the three shafts. The frame is formed by the integral molding, and hence it is possible to realize a drive device having a high rigidity.

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Kanagawa, Japan

Muneyoshi Nishitsuji