Sinfonia Technology Co., Ltd.

Munekazu Komiya

Yasushi Taniyama

Toshihiro Kawai

Takashi Shigeta

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device () by using a transfer robot () provided thereinside, and includes a circulation path (CL) formed inside of a transfer chamber () to circulate gas, a chemical filter unit () provided in the midstream of the circulation path (CL), and a connecting and disconnecting means () which switches connection and disconnection of the chemical filter unit () to and from the circulation path (CL).

Transfer chamber

Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unitwhich evacuates the sealed space.

Door opening/closing system, and load port equipped with door opening/closing system

There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply portthrough which inert gas is supplied; a nozzle main bodyincluding a gas passagecommunicating with the gas supply port; an opening/closing mechanismconfigured to close the gas supply port; and an openerconfigured to cause the opening/closing mechanismto open the gas supply portclosed by the opening/closing mechanism

Gas injection device

The transfer chamber transfers a wafer (W) as a transferred object to or from a processing device () by using a transfer robot () provided thereinside, and includes a circulation path (CL) formed inside of a transfer chamber () to circulate gas, a chemical filter unit () as a chemical filter provided in the midstream of the circulation path (CL), a humidity detector (HG) as a humidity detection means which detects internal humidity, a gas supply means (NS) which supplies gas to the inside of the transfer chamber (), and a moisture supply means (HS) which supplies moisture content to the inside of the transfer chamber (). The moisture supply means (HS) is made to operate in accordance with a humidity detection value by the humidity detection means.

A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.

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Minato-ku, Japan

Munekazu Komiya