Fujimi Incorporated

Muneaki Tahara

Hitoshi Morinaga

Keiji Ashitaka

Kazusei Tamai

Maiko Asai

Yuuichi Ito

Yasushi Matsunami

To provide a polishing pad capable of sufficiently polishing, in polishing of an object to be polished having at least one of a projection portion and a recessed portion on the surface, a portion near the projection portion or the inner surface of the recessed portion of the surface of the object to be polished. The polishing pad has a piloerection portion () in which a plurality of fibers () having a length of 2 mm or more are raised on the surface of a base (), in which the mass of the fibers () is 250 g/mor more. The polishing pad is used for polishing an object to be polished () containing metal, an alloy, or a metal oxide material and having at least one of a projection portion () and a recessed portion () on the surface.

Polishing pad and polishing method

A polishing composition contains colloidal silica. The colloidal silica satisfies the expression A&#xd7;D&#xd7;E&#xd7;F&#x2267;350,000 where 'A' denotes the average aspect ratio (dimensionless) of the colloidal silica, 'D' denotes the average particle diameter (units: nm) of the colloidal silica, &#x201c;E&#x201d; denotes the standard deviation of the particle size (units: nm) of the colloidal silica, and &#x201c;F&#x201d; denotes the volume fraction (units: %) of particles having a diameter of 1 to 300 nm in the colloidal silica. The volume fraction of particles having a diameter of 1 to 300 nm in the colloidal silica is 90% or greater.

Polishing composition

A method for producing boehmite particles includes subjecting powder of aluminum hydroxide to hydrothermal reaction together with a nucleation agent, thereby obtaining boehmite particles having an average primary particle size of 0.6 &#x3bc;m or less and including primary particles each having a hexahedral shape. A method for producing alumina particles includes: drying the boehmite particles produced by the above described method; calcining the boehmite particles, which have been dried, to obtain alumina particles; and disintegrating the obtained alumina particles.

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Aichi, Japan

Muneaki Tahara