Globalfoundries Singapore Pte. Ltd.

Mun Tat Yap

Jeoung Mo Koo

Shiang Yang Ong

Raj Verma Purakh

Namchil Mun

Tat Wei Chua

Integrated circuits and methods of producing such integrated circuits are provided. In an exemplary embodiment, a method of producing an integrated circuit includes determining a guard ring width within an integrated circuit design layout, where a guard ring with the guard ring width surrounds an active area in the integrated circuit design layout. A deep trench location is calculated for replacing the guard ring, where the deep trench location depends on the guard ring width. The guard ring in the integrated circuit design layout is replaced with a deep trench having the deep trench location. The deep trench is formed within a substrate at the deep trench location, where the deep trench surrounds the active area.

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Singapore, Singapore

Mun Tat Yap