Samsung Electronics Co., Ltd.

Sungkyunkwan University

Mun-Ja Kim

Tae-Sung Kim

Soo-Young Kim

Ji-Beom Yoo

Dong-Wook Shin

Seul-Gi Kim

Hee-Bom Kim

Hwan-Chul Jeon

Seong-sue Kim

Dong-gun Lee

Shang-hyeun Park

Byung-Gook Kim

Min-jong Bae

Jae-Hyuck Choi

Tae-won Jeong

Sang-hyun Kim

Chalykh Roman

Ji-beom Yoo

A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

Apparatus for manufacturing pellicle

Method of manufacturing pellicle and apparatus for assembling pellicle

A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent.

Pellicles and methods of manufacturing the same

Methods of reducing a registration error of a photomask are provided. A method of reducing a registration error of a photomask may include identifying the registration error with respect to a pattern element in a pattern region of the photomask. Moreover, the method may include reducing a thickness of a portion of a non-pattern region of the photomask by irradiating an energy beam onto a location of the non-pattern region of the photomask that is spaced apart from the pattern element, to generate stress at the pattern element. Related photomasks and methods of manufacturing an integrated circuit are also provided.

Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit

An inorganic electroluminescence device including a first electrode and a second electrode disposed apart from each other, and a dielectric material layer disposed between the first and second electrodes. The dielectric material layer has a micro-tubular shape, and a light emitting layer is filled in the dielectric material layer.

Inorganic electroluminescence device, display apparatus having the same and method thereof

Growing community of inventors

Suwon-si, South Korea

Mun-Ja Kim