Industrial Technology Research Institute

Mu-Huo Cheng

Hann-Tsong Wang

Yun-Sheng Chung

Yung-Ju Huang

Wen Jiang Yang

An MFC controlling device automation method and related system. The method mainly comprises the steps of automatically controlled algorithmic obtaining of MFC open loop system parameters by an identification technique; automatically controlled algorithmic determining of PI control parameters by a dominant pole-placement method; and automatically controlled calculating of a fuzzy logic rule table. The steps form an automatically controlled single closed loop. By performing said steps, multiple PI control parameter sets are obtainable fast and in an automatic way, and a calculation is done to form a refined fuzzy rule data table, so that a greatly enhanced MFC reaction function is attained.

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Chang-Hua Hsien, Taiwan

Mu-Huo Cheng