Average Co-Inventor Count = 10.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Ag (2 from 110 patents)
2 patents:
1. 11195730 - Method and apparatus for processing wafer-shaped articles
2. 10490426 - Method and apparatus for processing wafer-shaped articles