Invensense, Inc.

Mrigank Sharma

Luca Coronato

Matthew Julian Thompson

Giacomo Laghi

Varun Subramaniam Kumar

A MEMS sensor includes a central anchoring region that maintains the relative position of an attached proof mass relative to sense electrodes in the presence of undesired forces and stresses. The central anchoring region includes one or more first anchors that rigidly couple to a cover substrate and a base substrate. One or more second anchors are rigidly coupled to only the cover substrate and are connected to the one or more first anchors within the MEMS layer via an isolation spring. The proof mass in turn is connected to the one or more second anchors via one or more compliant springs.

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Milpitas, CA, United States of America

Mrigank Sharma