Powerchip Semiconductor Corporation

Mou-Sirn Chen

Hung-Chi Wang

Chung-Ming Kuo

The present invention provides a support stand. The support stand includes at least one H-beam set between a light source of an exposure machine and an operating machine of that to support an optical axis of the exposure machine, at least one supporting element set on a first part of the H-beam, a signal emitter set on a second part of the H-beam, and a signal receiver, receiving a signal sent from the signal emitter, set on a third part of the H-beam. The signal emitter and the signal receiver are used for detecting an optical axis shift.

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Ping-Tung Hsien, Taiwan

Mou-Sirn Chen