Hitachi, Ltd.

Hitachi-High-Technologies Corporation

National Institute of Advanced Industrial Science and Technology

Hitachi-Science Systems, Ltd.

Motohide Ukiana

Hidemi Koike

Shigeto Isakozawa

Hiroyuki Kobayashi

Mikio Ichihashi

Hiroyasu Kaga

Yuji Sato

Hiroshi Hirose

Akimitsu Okura

Syobu Saito

Tamio Tanikawa

Kazuhiro Fujii

Kanehiro Nagao

Shigeru Izawa

Kazuhiro Morita

A liquid metal ion gunincludes a liquid metal ion sourceand a beam limiting aperture. The liquid metal ion sourceincludes a reservoirand an emitter. The reservoiris made of tungsten (W) and holds liquid metal gallium (Ga). The emitteris made of W. The beam limiting apertureis formed with a liquid metal membermade of Ga placed on a basemade of W, has an openingthat enables an ion beamextracted from the liquid metal ion sourceto pass therethrough, and limits the diameter of the ion beam. The beam limiting aperturehas a groove structurethat causes the liquid metalto gather into a region located around the opening. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.

Liquid metal ion gun

Provision of a 3-DOF micro manipulator easy to operate and capable of executing accurate positioning, wherein the link mechanisms of the micro manipulator whose main operation is parallel 3-DOF operation are implemented by cutting, folding, and moding a sheet of metal plate. Base and end effector are connected by three link mechanisms. The three link mechanisms are manufactured by cutting and folding a flexible plate material, and are equipped with plate-like arm portions each having a spread in the axially peripheral direction of the end effector, with hinge portions that are formed longitudinally across each arm portion in order to function as revolving joints R, and with a hinge portion also formed at the middle position of the arm portion in order to function as revolving joints R. Also, a parallelogrammatic link is formed between one longitudinal end of the arm portion and the middle portion thereof in order to function as a prismatic joint pair P.

Micro manipulator

A sample evaluation/process observation system includes a common sample stage which accommodates a plurality of samples to be processed. The common sample stage is provided with a processing/observing notch and also with a movement mechanism. The movement mechanism functions to sequentially move the plurality of samples to the notch to cause the samples to be exposed to a predetermined processing beam and observing beam. The system further includes a beam processing device in which the common sample stage can be mounted and which functions to irradiate the predetermined processing beam on the plurality of samples through the notch to thereby sequentially perform beam processing operation over the samples. The system further includes a beam observation device in which the common sample stage can be mounted and which functions to irradiate the predetermined observing beam on the plurality of samples through the notch to sequentially observe and evaluate shapes of the plurality of samples. A mark is formed on one sample by a focused ion beam device so that positioning of the mark realizes automatic processing of a part of the sample to be processed. Further, the common sample stage is used in a high-acceleration transmission electron microscope and a high-acceleration scanning electron microscope and focused ion beam device.

Sample evaluation/process observation system and method

Method and apparatus for fine movement of a specimen stage of an electron microscope wherein a value of enlargement magnification M of the electron microscope is set, a manipulation unit adapted to move an image enlarged by the electron microscope in X or Y direction is then manipulated; a pulse signal PX2 or PY2 which accords with a manipulation amount of the manipulation unit is delivered, the specimen stage is moved in the X or Y direction in accordance with the delivered pulse signal, a pulse signal PX1 and PY1 which accords with a moving distance of the specimen stage in the X or Y direction is delivered, and the operation of movement of the specimen stage is stopped when the relation represented by PX2.multidot.K/M=PX1 or the relation represented by PY2.multidot.K/M=PY1 stands, where K is a constant.

Method and apparatus for fine movement of specimen stage of electron

A specimen holder holding a frozen specimen is adapted to engage the opened end of a recess in a specimen support, such that the frozen specimen is exposed to the inside of the recess. The mutually engaging specimen holder and the specimen support are shifted to a specimen chamber. In the specimen chamber, the specimen holder is separated from the specimen support and is received by a specimen receiving chamber. The specimen holder received by the specimen receiving member can be moved together with the latter to a specimen treating chamber. Cooling means for cooling the specimen receiving member is unitarily secured to the specimen receiving member, so as to be moved together with the specimen receiving member.

Device for shifting frozen specimen, for use in scanning type electron

Growing community of inventors

Hitachinaka, Japan

Motohide Ukiana