Nikon Corporation

Motofusa Kageyama

Naoyasu Uehara

There is provided a calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape. A {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube.

Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device

Provided is a lens barrel comprising a lens holding member that holds a lens; a guide bar that has a magnetic pattern in which a pair of magnetic poles repeat in a longitudinal direction and that has the longitudinal direction thereof oriented in a direction of an optical axis of the lens to guide the lens holding section to move in the direction of the optical axis; a control portion that is disposed on an outer circumferential surface of the lens holding member and that includes a magnetic body generating magnetic force between itself and the magnetic pattern of the guide bar; and a drive coil that is arranged in a manner to not contact the guide bar and that generates magnetic drive force between itself and the guide bar.

Lens barrel and image capturing apparatus

Magnetically shielded enclosures (e.g., rooms) and associated methods are disclosed for containing and magnetically shielding a field-sensitive system such as a charged-particle-beam (CPB) microlithography system without having to make the enclosure excessively large. The CPB microlithography system includes a lens column and substrate chamber collectively forming an internal shielding barrier. The shielded enclosure is in external surrounding relationship to the internal shielding barrier. The shielded enclosure includes a wall that defines an aperture through which some of the stray external magnetic field can penetrate to inside the enclosure. Some of the external magnetic field also leaks through the enclosure walls. The aperture is situated and configured such that the external magnetic flux leaking through the aperture (which flux tending to be directed toward the enclosure walls) and other external magnetic flux leaking through the enclosure walls (which flux tending to be directed toward the internal shielding barrier) at least partially cancel each other. This cancellation reduces the amount of the leakage flux that penetrates the internal shielding barrier to the field-sensitive system inside the barrier.

Growing community of inventors

Fujisawa, Japan

Motofusa Kageyama