Pulse Mems Aps.

Morten Ginnerup

Pirmin Rombach

Morten Berg Arnoldus

The invention relates to an acoustic micro-electrical-mechanical-system (MEMS) transducer formed on a single die based on a semiconductor material and having front and back surface parts opposed to each other. The invention further relates to a method of manufacturing such an acoustic MEMS transducer. The acoustic MEMS transducer comprises a cavity formed in the die to thereby provide a back volume with an upper portion facing an opening of the cavity and a lower portion facing a bottom of the cavity. A back plate and a diaphragm are arranged substantially parallel with an air gap there between and extending at least partly across the opening of the cavity, with the back plate and diaphragm being integrally formed with the front surface part of the die. The bottom of the cavity is bounded by the die. The diaphragm may be arranged above the back plate and at least partly extending across the back plate. It is preferred that the backside openings are formed in the die with the openings extending from the back surface part of the die to the cavity bottom. Part of or all of the backside openings may be acoustically sealed by a sealing material.

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Lyngby, Denmark

Morten Ginnerup