Infineon Technologies Ag

Infineon Technologies Austria Ag

Moritz Hauf

Hans-Joachim Schulze

Anton Mauder

Roman Baburske

Holger Schulze

Benedikt Stoib

Guang Zeng

A power semiconductor device includes, an active area that conducts load current between first and second load terminal structures, a drift region, and a backside region that includes, inside the active area, first and second backside emitter zones one or both of which includes: first sectors having at least one first region of a second conductivity type contacting the second load terminal structure and a smallest lateral extension of at most 50 μm; and/or second sectors having a second region of the second conductivity type contacting the second load terminal structure and a smallest lateral extension of at least 50 μm. The emitter zones differ by at least of: the presence of first and/or second sectors; smallest lateral extension of first and/or second sectors; lateral distance between neighboring first and/or second sectors; smallest lateral extension of the first regions; lateral distance between neighboring first regions within the same first sector.

Power semiconductor device

A single chip power diode includes a semiconductor body having an anode region coupled to a first load terminal and a cathode region coupled to a second load terminal. An edge termination region surrounding an active region is terminated by a chip edge. The semiconductor body thickness is defined by a distance between at least one first interface area formed between the first load terminal and the anode region and a second interface area formed between the second load terminal and the cathode region. At least one inactive subregion is included in the active region. Each inactive subregion: has a blocking area with a minimal lateral extension of at least 20% of a drift region thickness; configured to prevent crossing of the load current between the first load terminal and the semiconductor body through the blocking area; and at least partially not arranged adjacent to the edge termination region.

Single chip power diode and method of producing a single chip power diode

Diode and method of producing a diode

A power semiconductor device includes: a semiconductor body; a first load terminal structure coupled to the body front side and a second load terminal structure coupled to the body backside; an active area for conducting a load current between the load terminal structures; a drift region having a first conductivity type; a backside region arranged at the backside and including, inside the active area, first and second backside emitter zones. At least one of the backside emitter zones includes: first sectors each having at least one first region of a second conductivity type, the first region arranged in contact with the second load terminal structure and having a smallest lateral extension of at most 50 &#x3bc;m; and/or second sectors each having a second region of the second conductivity type arranged in contact with the second load terminal structure and having a smallest lateral extension of at least 50 &#x3bc;m.

Growing community of inventors

Munich, Germany

Moritz Hauf