Hitachi, Ltd.

Hitachi-Science Systems, Ltd.

Nissel Sangyo America, Ltd.

Morioki Kubozoe

Hiroyuki Kobayashi

Shigeto Isakozawa

Setsuo Nomura

Sadao Terakado

Kazuo Shii

Shinjiro Katagiri

Yoshihisa Minamikawa

John E Johnson, Jr

Mitsuo Ogasawara

Hisasi Satow

Hisasi Sato

In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein

Bi-axial-tilting specimen fine motion device and method of correcting

In a transmission electron microscope, an electron beam from an electron gun is irradiated on a specimen by an illuminating lens system and a transmission image of the specimen is formed on a photographic film by an image forming lens system. The transmission image is picked up by a TV camera and displayed on a television display screen and a view field range of recording image with the photographic film is manifested on the display screen.

Transmission electron microscope

An electron lens assembly comprises at least a pair of magnetic pole pieces disposed in opposition to each other and each having a bore allowing an electron beam to pass therethrough, an exciting coil for producing a magnetic field between the magnetic pole pieces, a yoke coupled to the magnetic pole pieces and constituted by two divided yoke members so that the exciting coil can be accommodated, at least one of the two yoke members being detachably coupled to one of the magnetic pole pieces, and a pipe disposed along the electron beam path for defining a passage for the electron beam except for a space formed between the magnetic pole pieces. A metal O-ring is disposed on a surface of the detachable yoke member so as to prevent the air from entering the space defined between the opposite magnetic pole pieces along the surface of the detachable yoke member from a space accommodating the exciting coil. The electron beam passage defining pipe is coupled integrally to the detachable yoke member. With the electron lens structure, an ultra-high vacuum can be sustained within the column.

Electron lens assembly

A focus control system used in a transmission electron microscope includes an electron lens for imaging the electron beam transmitted through a specimen onto the imaging plate, apparatus for deflecting the electron beam irradiation angle, and several electron beam sensors disposed of the imaging plane. Output signals produced by each sensor at two irradiation angles are integrated and stored in the memory separately. The difference between each pair of integrated values in the memory is calculated, and all differences for all sensor output pairs are summed up. The lens current of the electron lens is controlled so that the summed output is a minimum value.

Focusing apparatus used in a transmission electron microscope

A transmission electron microscope comprises an imaging electron lens system constituted in at least five stages by an objective lens, a group of intermediate lenses and a group of projector lenses to which excitation currents are applied with alternately different polarities. Lens current control means is provided for controlling the excitation currents in such a manner that the lenses belonging to the intermediate lens group and the projector lens group, respectively, serve as reduction lens when the microscope is operated in a predetermined range of low magnifications, while all the electron lenses serve as magnifying lenses in a predetermined range of high magnitudes. When the magnification is changed over, the lens current control means regulates the excitation currents in such a manner that the difference between the excitation currents supplied to the intermediate lens group and the projector lens group, respectively, is maintained substantially constant.

Image distortion-free, image rotation-free electron microscope

An electron energy analyzing apparatus is disclosed in which electrons having passed through a sample are subjected to energy analysis, respective energy values of the crest and trough of an energy peak characterizing a predetermined substance in the sample are selected, subtraction is performed beetween output signals of a detector obtained respectively at the energy values, the sign of a difference between the output signals is judged to separate a background signal from an energy loss peak signal, and a distribution image of the substance is displayed on the basis of the energy loss peak signal containing no background signal.

Electron energy analyzing apparatus

Electron microscope imparted with measuring functions comprises an electron microscope system for forming an electron-microscopic image, a fluorescent screen for displaying the electron-microscopic image, and an optical microscope for observing the electron-microscopic image on the fluorescent screen. A pattern which provides convenience for measurements of the electron-microscopic image is imaged on an object plane of an eyepiece of the optical microscope.

Electron microscope equipped with measuring facility

An electron beam from an electron gun is made to focus on a first position by a focussing lens system. The focussed beam is then magnified and projected on a screen through a magnification lens system having an objective lens, an intermediate lens and a projection lens. The excitation is so variable that the electron beam may be focussed also on a second position behind the projection lens. A specimen is positioned at the first position for normal electron microscope analysis, while, for a scanning electron microscope analysis, another specimen is put at the second position.

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Katsuta, Japan

Morioki Kubozoe