Mitutoyo Corporation

Other

Morimasa Ueda

Kiyokazu Okamoto

Yutaka Kuriyama

Hiroyuki Hidaka

Kunitoshi Nishimura

Jun Ishikawa

Makoto Abe

Hiroki Masuda

Takahumi Kano

Hiroyuki Tokitoh

Shigekata Ohta

An optical measuring light path formed by a vacuum-side laser beam (Pa) as a reference standard and an optical measuring light path formed by a gas-side laser beam (Pb) as a dimension to be measured are coaxially located sandwiching a movable end (optical transparent body ) of a vacuum container ( ) in order to satisfy Abbe's principle requiring linear disposition of the reference standard and the dimension to be measured in measurement direction, thereby reducing measurement error in measuring air refractive index and improving measurement accuracy therefor.

Air refractometer

There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.

Length measuring machine and method using laser beams

A measurement-datum similar to profile of a measuring object set in a measuring area in which a detector and the measuring object are moved relatively is formed to measure the displacement value between the detector and the measuring object through the relative movement based on the measurement-datum to thereby compute the surface contour of the measuring object from the measured data with reference to the measurement-datum. Since the measurement-datum is set in the spatial area, a precise mechanical processing will not be required for an accurate measurement of the measuring object having a strange profile which was not measured by conventional apparatus.

Method of and an apparatus for measuring surface contour

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Tsukuba, Japan

Morimasa Ueda