Fujitsu Corporation

Morihiko Hamada

Yoshikazu Arisaka

Shigekazu Aoki

Kenji Togashi

Toyoji Sawada

Katsumi Shigenobu

Shigenobu Ishihara

Tsutomu Tatematsu

Kunihiro Itagaki

Yukio Saka

Tadashi Asai

Tetsuhiro Nanbu

A probe card is used to test an electronic device. The probe card includes a base plate and a cantilever-type probe arranged on the base plate. The cantilever-type probe has an end that contacts the contacted body and moves when contacting the contacted body. A stopper arranged on the base plate restricts the movement of the cantilever-type probe.

Probe card, having cantilever-type probe and method

A semiconductor memory device includes a self-testing circuit and a self-redundancy circuit with simple structures. The self-testing circuit includes a comparison circuit which compares write data with read data with respect to normal memory blocks and redundant memory blocks, and a decision circuit which decides if the semiconductor memory device is good or defective based on the plurality of comparison result signals. A signal transfer and holding circuit is connected between the comparison circuit and the decision circuit to transfer the plurality of comparison result signals to the decision circuit and to supply the plurality of comparison result signals to the self-redundancy circuit as a test result.

Self-testing circuit in semiconductor memory device

A semiconductor testing apparatus for conducting a conduction test after stabilizing contact between probing pins and a wafer is provided. The semiconductor testing apparatus includes a heat transfer block which is contacted to the probing pins to adjust the temperature of the probing pins to a predetermined testing temperature before the probing pins are brought into contact with the wafer.

Semiconductor testing apparatus for conducting conduction tests

Growing community of inventors

Kawasaki, Japan

Morihiko Hamada