Durex International Corporation

Morgan J Schultz

Jason S Smith

Nicholas V Hein

A flexible, substantially lamellar silicone foam rubber-based heater for heating fluid lines such as high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses a flexible, oblong substantially longitudinally uniform heater body including an oblong block of a thermally conductive, resiliently compressible material for conforming the heater to a line of complexly shaped components connected in series. The block can be supported by a silicone rubber support layer in contact with a flexible heater element containing layer, and an outer silicone foam rubber insulation layer. Fasteners, such as separatable retaining bands spaced along the line can hold the heater in place. A matable pair of bodies, or a single folded body can enwrap the line.

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McHenry, IL, United States of America

Morgan J Schultz