Samsung Electronics Co., Ltd.

Moosong Lee

Seung Yoon Lee

Jeongjin Lee

Gabin Lee

Gyeongnyeong Lee

Seongbo Shim

An embodiment of a plant cultivation system comprises at least one plant cultivation guide in which a plurality of containers planted with plants are arranged and supported, wherein the plant cultivation guide having a starting part positioned at a central part so that the container is loaded to begin growing plants, and a harvesting part positioned along a circumference of the central part so that plants are harvested, the containers are sequentially transported from the starting part to the harvesting part and continuously cultivated according to the growth stage of the planted plants.

Plant cultivation system

A method includes forming a first photomask including N mask chip regions and a first mask scribe lane region surrounding each of the N mask chip regions, forming a second photomask including M mask chip regions and a second mask scribe lane region surrounding each of the M mask chip regions, performing a first semiconductor process including a first photolithography process using the first photomask on a semiconductor wafer; and performing a second semiconductor process including a second photolithography process using the second photomask on the semiconductor wafer. The first photolithography process is an extreme ultraviolet (EUV) photolithography process, the first photomask is an EUV photomask, N is a natural number of 2 or more, and M is two times N.

Extreme ultraviolet (EUV) photomask and method of manufacturing semiconductor device using the same

An EUV photomask may include a multi-layered structure on a substrate, a capping layer on the multi-layered structure, and an absorber on the capping layer. The absorber may include a first sidewall and a second sidewall. The first sidewall may extend from an upper surface of the capping layer in a vertical direction substantially perpendicular to an upper surface of the substrate, and may be a flat plane. The second sidewall may extend from the first sidewall in the vertical direction, and may be a curved surface.

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Seoul, South Korea

Moosong Lee