United Microelectronics Corp.

Mon-Sen Lin

Chih-Chien Liu

Yu-Ping Wang

Tsun-Min Cheng

Ching-Ling Lin

Min-Chuan Tsai

Shao-Wei Wang

Jen-Chieh Lin

Hao-Yeh Liu

Pei-Ying Li

Chien-Ming Lai

Chun-Tsen Lu

Ya-Huei Tsai

Yu-Ting Tseng

Ching-Hsiang Chiu

A semiconductor device and a method of forming the same, the semiconductor device include a substrate, and a first transistor, a second transistor and a third transistor all disposed on the substrate. The first transistor includes a first channel, and a first barrier layer and a first work function layer stacked with each other on the first channel. The second transistor includes a second channel, and a second barrier layer and a second work function layer stacked with each other. The third transistor includes a third channel and a third barrier layer and a third work function layer stacked with each other on the third channel, wherein the first barrier layer, the second barrier layer and the third barrier layer have different nitrogen ratio. The first, the second and the third transistors have different threshold voltages, respectively.

Semiconductor device and method of forming the same

A method of fabricating a fin field effect transistor including providing a substrate having at least one fin structure, a dummy gate, and an internal dielectric layer thereon, removing the dummy gate to form a gate trench on the fin structure, blanketly forming a stress film on the substrate to cover a surface of the gate trench, performing a thermal annealing process, removing the stress film, and forming a metal gate is in the gate trench.

Method of fabricating fin field effect transistor

A metal gate structure located on a substrate includes a gate dielectric layer, a metal layer and a titanium aluminum nitride metal layer. The gate dielectric layer is located on the substrate. The metal layer is located on the gate dielectric layer. The titanium aluminum nitride metal layer is located on the metal layer.

Metal gate structure and fabrication method thereof

Growing community of inventors

Ping-Tung County, Taiwan

Mon-Sen Lin