Ebara Corporation

Momoko Kakutani

Hiroshi Nagasaka

Naoaki Ogure

Tadashi Kataoka

Matsuho Miyasaka

Kenichi Sugiyama

Yoshikazu Kimura

Tohru Satake

Yuji Araki

Kuniaki Horie

Kunio Tateishi

Takashi Yoda

There is provided a method of performing a surface treatment, such as coating, denaturation, modification and etching, on a surface of a substrate. The method comprises the steps of bringing a surface treatment gas into contact with a surface of a substrate, and irradiating the surface of the substrate with a fast particle beam to enhance an activity of the surface and/or the surface treatment gas, thereby facilitating a reaction between the surface and the gas. The fast particle beam may be selected from a group consisting of an electron beam, a charged particle beam, an atomic beam and molecular beam. For example, during a coating operation, chemical deposition of predetermined component elements of the gas onto the surface is effected and a predetermined portion of the surface of the substrate is irradiated with a particle beam to form a coating layer on the predetermined portion.

Coating, modification and etching of substrate surface with particle beam irradiation of the same

This invention relates to a hard coating developed for applications involving high-temperature corrosion by improving the performance of TiN coatings while retaining the superior wear resistance and low friction coeffident of TiN itself. The nitride-based sliding material has a face-centered cubic crystalline structure with lattice constant of between 0.414 and 0.423 nm, and is made of mostly TiN but contains at least one element selected from the group containing Al, Cr, Zr and Hf; or comprises a nitride-based material containing substantially titanium nitride and at least one element selected from a group consisting of B and Si, and having a face-centered cubic crystalline structure comprising crystallites of an average size of not more than 9 nm.

Sliding member and manufacturing method therefor

The invention aims to provide a hard film which is improved in high-temperature corrosion resistance without impairing high sliding characteristics (wear resistance, low frictional coefficient) inherent in a titanium nitride thin film and which is suitable for a slide member such as a bearing or a seal used in rotary machines operated at a high temperature, such as a steam turbine and a gas turbine. For attaining this aim, the invention provides a Cr-containing titanium nitride film which is composed of a nitride containing Ti and Cr as main components, the crystal particles thereof having a face-centered cubic crystal structure, and the crystal thereof being highly oriented toward (200) face.

Cr-containing titanium nitride film

A improved dresser for dressing a polishing surface, easily be manufactured such that an object to be polished is not scratched when the object is polished. The dresser can dress the polishing surface of a polishing apparatus to effect surface correction and to correct a time-lapse change due to a polishing operation, a number of spired projections are formed on a surface of a metallic substrate and a wear-resistant hard film is formed on at least a portion of the surface of the metallic substrate on which the projections are formed.

Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus

A water lubricated bearing or water lubricated seal using water as a lubricant. The bearing or seal has: a rotary member secured directly or indirectly to a rotary side, and a stationary member secured directly or indirectly to a stationary side and facing the rotary member for making sliding contact therewith. A substrate of either one of the rotary member and the stationary member is a metallic material and a thin titanium nitride film is formed on the sliding surface thereof. The other member is made of a non-brittle material or a film of hard material is formed on the sliding surface thereof. Thereby, a coefficient of friction of the bearing or seal is reduced and a wear resistance of the same is improved.

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Tokyo, Japan

Momoko Kakutani