Balzers Aktiengesellschaft

Moll Eberhard

Rudolf Wagner

Renzo Zanardo

J G Van Agtmaal

Bader Martin

A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed by a closing member. A transporting mechanism, preferably in the form of a robot arm, is located in the distribution chamber which is adjoined by intermediate chambers distributed along its circumference as exchangeable modules whereby the communication between them can be shut off at each point of connection by a closing member. An intermediate chamber communicates with at least one treatment chamber via an allocated communication opening which, in order to allow a separation of the treatment chamber, is accessible from the intermediate chamber. In the intermediate chamber a further transport mechanism is arranged for taking over the workpieces from the first transport mechanism, which further transport mechanism places the workpieces onto an elevating table located under the treatment chamber. The table forwards the workpiece into the allocated treatment chamber and separates it thereby at the same time from the distribution chamber. Preferably a plurality of treatment chambers are allocated to each intermediate chamber. The closing members at the communication openings between the chambers are controlled during the treatment procedures so that no undesired passing of gases and particles from one treatment station into the other is possible.

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Schellenberg, Liechtenstein

Moll Eberhard