Jds Uniphase Corporation

Jds Fitel Inc.

Metconnex Canada Inc.

Mohiuddin Mala

John Michael Miller

Graham McKinnon

Yuan Ma

Thomas Ducellier

Barrie P Keyworth

Robert I MacDonald

Alan Hnatiw

Graham Mckinnon

Paul Colbourne

David Reese Peale

Joshua Philipson

Feliks Lapinski

Phillipe Lonjoux

Lianxiang Yang

Karen Stauss

David Peale

The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.

Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays

The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.

Articulated MEMs structures

A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A 'piano'-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these 'piano' MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an &#x201c;internal&#x201d; gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

Electrical x-talk shield for MEMs micromirrors

Electrical x-talk shield for MEMS micromirrors

A 'piano'-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these 'piano' MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device's platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.

Two-step electrode for MEMs micromirrors

The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A 'piano'-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these 'piano' MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an &#x201c;internal&#x201d; gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

Piano MEMs micromirror

The invention provides a fast variable optical attenuator including a reflective membrane that serves as a varifocal mirror. Electrostatic deflection of the mirror defocuses the optical system and attenuates an optical signal launched to the mirror from an input port to an output port. Since the mirror is generally limited to deflections less than 1 micron, fast attenuation within a small (<5 dB) dynamic range is achieved. The dynamic range is improved by combining the fast attenuator with a slower attenuator. In the preferred embodiment, the slow and fast attenuator are not coupled via optical waveguides, but rather are optically coupled via free space or are integrated in the same device. Advantageously, this compact arrangement reduces the excess loss associated with optical fiber coupling and lowers packaging costs.

Fast attenuator

Apparatus for modifying the optical characteristics of an optical fiber by controlled stretching of a length of the fiber, comprising a first fiber holder fixedly carried by a base and capable of firmly holding a first portion of the optical fiber, a lever part attached to the base at a fulcrum, and second fiber holder movably connected to the lever part and capable of firmly holding a second portion of the fiber, so that an intermediate length of fiber may be held taut between said first and second holding means. An electromagnetic circuit moves the lever part between first and second predetermined positions, so that the intermediate length of fiber is stretched as the lever part moves between first and second positions. Preferably, the intermediate length of fiber includes a Bragg grating.

Apparatus for varying the optical characteristics of an optical fiber by stretching the fiber

An optical switch mechanism for reflecting an input light beam from an input port to a reflection output port in a first state and for transmitting an input light beam to a transmission output port in a second state is disclosed. The switch mechanism comprises a block made of a light transmissive substrate. The block contains a cavity, which is divided by a light transmissive diaphragm into a reflective portion and a transmissive portion. At the input port a light beam is coupled into the block such that the light beam encounters a reflective surface at an angle greater than a critical angle determined by the refractive indices of the substrate and a reflective fluid retained in the reflective portion of the cavity. When the reflective fluid is in contact with the reflective surface the light beam is totally reflected to a reflection output port. Changing hydrostatic pressure moves the transmissive diaphragm into a position where it is in a touching relationship with the reflective surface and the light beam is then transmitted to a transmission output port. The switch mechanism is simple, reliable, fast and easy to manufacture.

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Kanata, Canada

Mohiuddin Mala