Universiti Malaya

Mohd Adreen Shah Bin Azman Shah

Ahmad Shuhaimi Bin Abu Bakar

A method of depositing a coating layer comprising gallium nitride on a substrate comprising the steps of: (a) providing the substrate having a plurality of side walls and valleys; (b) forming a first layer of gallium nitride deposited on the substrate, by reacting gaseous trimethylgallium and ammonia at a temperature ranging from 400 to 500&#xb0; C., such that the first layer is formed on the side walls and the valleys; and (c) forming a second layer of gallium nitride deposited on top of the first layer, by reacting gaseous trimethylgallium and ammonia at a temperature ranging from 1000 to 1200&#xb0; C., to obtain the coating layer comprising the first layer of gallium nitride and the second layer of gallium nitride at a thickness ranging from 3.0 to 4.5 &#x3bc;m.

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Kuala Lumpur, Malaysia

Mohd Adreen Shah Bin Azman Shah