Qorvo Us, Inc.

Mohammad J Modarres-Zadeh

Paul Stokes

Robert Aigner

Gernot G Fattinger

Yazid Yusuf

Andreas Tag

Alireza Tajic

Disclosed is a Bulk Acoustic Wave (BAW) filter structure with a conductive bridge forming an electrical loop with an electrode for reduced electrical losses. In exemplary aspects disclosed herein, the BAW filter structure includes a transducer with electrodes, a piezoelectric layer between the electrodes, and at least one conductive bridge offset from at least a portion of one of the electrodes by an insulating volume. The conductive bridge forms a first electrical loop between a medial end and a distal end of the electrode. Such a configuration reduces electrical resistance, heat resistance, and/or ohmic losses for improved electrical loss of the BAW filter structure.

Bulk acoustic wave filter structure with conductive bridge forming electrical loop with an electrode

Resonator structures are provided, as well as methods and structures for generating smooth electrodes and electrode structures with a uniformly smooth surface.

Methods and structures for generating smooth electrodes and electrode structures with a uniformly smooth surface

Bulk acoustic wave (BAW) resonators, and particularly shaped border (BO) rings for BAW resonators are disclosed. Top electrode arrangements are disclosed that include a BO ring arranged about a periphery of a top electrode, where the BO ring forms a top surface having a shape that is sloped or graded in comparison to planar surfaces of the top electrode. The top surface of the BO ring may be arranged such that a height of the top surface is graded in a descending manner toward a central region of the BAW resonator. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing reduced acoustic leakage and mode conversion.

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Longwood, FL, United States of America

Mohammad J Modarres-Zadeh