Cymer, Inc.

Magmedics, LLC

Mohammad Amin Khamehchi

Thomas D Steiger

Edward Siqi Luo

Andrew Jay Effenberger, Jr

Kasey R Lund

A pulsed-discharge radiation source includes a gas chamber, a window, and a conduit system. The conduit system includes a refill path and a conduit. The pulsed-discharge radiation source generates radiation. The gas chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the gas chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit circulates the gas to or from the gas chamber during the generating. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window, whereby the conduit system increases the usable lifetime of at least the window.

Conduit system, radiation source, lithographic apparatus, and methods thereof

An apparatus for a light source includes: an electrical insulator that defines a channel; a gasket that surrounds at least a portion of the electrical insulator; and a shield between the channel and the gasket. The channel is configured to receive an electrical conductor. The gasket includes a non-metallic material.

Electromagnetic shield for a sealing mechanism of a laser chamber

An array of permanent magnets and magnetic materials create a large focused magnetic field capable of reducing the viscosity of blood in a human subject, and consequently reducing the blood pressure of the subject. The magnets can be arranged in highly tunable and customizable configurations suited to unique and individual applications.

Growing community of inventors

San Diego, CA, United States of America

Mohammad Amin Khamehchi