International Business Machines Corporation

Mohamed Talbi

Lars W Liebmann

Scott Marshall Mansfield

John Matthew Safran

Jean-Oliver Plouchart

Raminderpal Singh

Lawrence F Wagner, Jr

Yue Tan

Kun Wu

A method, and computer program product and system for performing the method, is provided for designing a mask used in the manufacture of semiconductor integrated circuits, in which a model of the lithographic process is used during the mask design process. More particularly, the on-wafer process model is a function of optical image parameters that are calibrated using measurements from a test pattern. An uncertainty metric for the predicted response simulated by the on-wafer process model is computed for a given evaluation point of interest as a function of a distance metric between the collective optical image parameters simulated at the given evaluation point and the collective optical image parameters at the calibration data points. The uncertainty metric preferably is also a function of the sensitivity of the on-wafer process model response to changes in the optical image parameters.

Method to check model accuracy during wafer patterning simulation

A sub-circuit based extraction method which extracts a multi-finger MOS transistor directly as a sub-circuit is described. By adding three marking layers, the method provides the layout extracted netlist with a complete list of device geometric parameters corresponding to the device properties as presented in the sub-circuit model based schematic netlist. By performing a layout-versus-schematic comparison based on all geometric parameters extracted, the layout checking is performed in a complete and accurate way where each device parameter is checked against the corresponding design schematic. This complete and accurate geometric parameter comparison enhances the confidence level of the layout physical verification.

Method of checking the layout versus the schematic of multi-fingered MOS transistor layouts using a sub-circuit based extraction

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Poughkeepsie, NY, United States of America

Mohamed Talbi