Si-ware Systems

Mohamed Nabil

Bassam Amanallah Saadany

Bassem Mortada

Mostafa Medhat

Diaa A Khalil

A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

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Cairo, Egypt

Mohamed Nabil