Other

Takasago Netsugaku Kogyo Kabushiki Kaisha

Mizuho Morita

Tadahiro Ohmi

Tadashi Shibata

Takashi Imaoka

Takeo Yamashita

Masakazu Nakamura

Hisayuki Shimada

Hidetoshi Wakamatsu

Jinzo Watanabe

Nobuhiro Konishi

Shintaro Aoyama

Takaaki Hirokane

A particle detection device () included substrates (), insulating members (), supporting member (), and electrodes (). The insulating member () is provided on a principal surface of the substrate () and has a recess. The insulating member () is provided so as to make contact with the insulating member () and the substrate (). The substrate () is formed on a principal surface of the supporting member (). The electrode () is formed on a surface, which is opposite to the surface where the insulating member () is formed, of the substrate (). The electrode () is formed on the surface (A), the side surface (B), and the rear surface (C) of the supporting member () so as to be connected to the substrate (). Accordingly, the detection deviceincludes a gap () surrounded by the insulating members (). The substrate () is connected to the substrate () with the insulating members () and the supporting member () (quartz). In one embodiment, the insulating member () consist of quantum dots. Detection of the particles is either optically or electrically.

Detection device and detection system using the same

A method of forming an oxide film having high insularity capability is performed within an ultra clean environment, using charged particles.

Oxide film forming method

Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressure in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultra rays on gases introduced to at least of the vessels.

Method of forming oxide film

Growing community of inventors

Sendai-shi, Miyagi-ken, Japan

Mizuho Morita