Samsung Electronics Co., Ltd.

Dongjin Semichem Co., Ltd.

Miyeong Kang

Jihyun Kim

HyunJin Kim

Hyosung Lee

Sukkoo Hong

Suk Koo Hong

Sunkak Jo

Hyereun Kim

Jungyoul Lee

Jongkyoung Park

Kyoungyong Cho

Hyojung Roh

Bora Kim

Hyeji Kim

A polymer having a repeating unit represented by Formula 1:

Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film

A polymer having a repeating unit represented by Formula 1: 

Embodiments of the inventive concepts provide a method for manufacturing a semiconductor device. The method includes forming a stack structure including insulating layers and sacrificial layers which are alternately and repeatedly stacked on a substrate. A first photoresist pattern is formed on the stack structure. A first part of the stack structure is etched to form a stepwise structure using the first photoresist pattern as an etch mask. The first photoresist pattern includes a copolymer including a plurality of units represented by at least one of the following chemical formulas 1 to 3, wherein 'R', 'R', 'R', &#x201c;p&#x201d;, &#x201c;q&#x201d; and &#x201c;r&#x201d; are the same as defined in the description. 

Method for manufacturing semiconductor device

Embodiments of the inventive concept provide a method for manufacturing a semiconductor device. The method includes forming a stack structure by alternately and repeatedly stacking insulating layers and sacrificial layers on a substrate, sequentially forming a first lower layer and a first photoresist pattern on the stack structure, etching the first lower layer using the first photoresist pattern as an etch mask to form a first lower pattern. A first part of the stack structure is etched to form a stepwise structure using the first lower pattern as an etch mask. The first lower layer includes a novolac-based organic polymer, and the first photoresist pattern includes a polymer including silicon.

Growing community of inventors

Incheon, South Korea

Miyeong Kang