S-tec Corporation

Mitsuzo Shimomura

Masao Yamaguchi

Yoshiro Torii

The output from the sensor detecting the flow rate of the fluid passing through the conduit is compared with the ceiling value and the appointed compensating signal is added to the output from the sensor to display the signal obtained on the basis of this addition result as the value of flow rate or reduce the openness of the control valve on the basis of the above described signal when the output from the sensor is larger than the threshold value, so that the mass flow meter can accurately display the flow rate even when the fluid passes in an excessive flow rate. In addition, even though the mass flow meter and the mass flow controller are fallen into the abnormal operating condition due to an excessive flow rate of fluid, they can be quickly returned to the normal operating condition.

Mass flow meter and mass flow controller

An improved mass flow controller can be connected to a passageway of a fluid, and can utilize a sensor unit for measuring a characteristic of the mass flow, and deriving a corresponding flow rate signal. Supplemental condition sensors can measure other parameters of the flow rate independent of their utilization in determining the actual flow rate, and can monitor and compare the current value of these sensor conditions, with standards to thereby monitor the operational performance of the mass flow controller.

Mass flow controller with supplemental condition sensors

An electrical power supply for an electrolytic gas generator includes an input network provided with a first rectifying-flattening circuit for generating a DC voltage from an AC power source voltage input thereto and an output network provided with a switching circuit for generating a pulse voltage having a predetermined frequency from the DC voltage supplied from the input network and a second rectifying-flattening circuit for transforming the pulse voltage into the DC voltage and for supplying this DC voltage to an electrode of the electrolytic cell. The power supply further includes a voltage-adjusting circuit for generating an error signal corresponding to the difference between a feedback signal for any one of a signal corresponding to the output voltage from the output network and a signal corresponding to a detected pressure of the gas generated within the electrolytic cell and a standard signal corresponding to a design pressure of the gas generated so as to maintain the output value of the output network or the pressure of the gas generated at a predetermined design value and further includes a frequency-fixed pulse-width modulator for generating a pulse-signal having a predetermined frequency modulated to a pulse-width corresponding to the error signal and a driver circuit for generating a drive pulse for controlling the switching of the switching circuit in the output network in accordance with the modulated pulse signal from the modulator.

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Minami, Japan

Mitsuzo Shimomura