Nippon Tungsten Co., Ltd.

Sumitomo Special Metals Co., Ltd.

Shinko Electric Industries Co., Ltd.

Japan Fine Ceramics Center

Ube Material Industries, Ltd.

Trek Holding Co., Ltd.

Mitsuyoshi Nagano

Mitsuhiko Furukawa

Toshiaki Wada

Michito Miyahara

Masaharu Shiroyama

Shigeki Mohri

Toyoshige Sasaki

Kouta Tsutsumi

Shigeo Inoue

Norio Shiraiwa

Tetsuo Uchiyama

Koki Tamagawa

Takashi Kitahira

Toshio Uehara

Tadayoshi Yoshikawa

Shigeya Sakaguchi

Miki Saito

Hideaki Matsubara

Satoru Sano

Masanobu Takasu

Tetsushi Matsuda

Norimitsu Mukae

Kouki Minamoto

Shinzou Mitomi

Eiji Okuma

Ryou Matsuo

Haruka Tamura

Yo Arita

Yasumi Takano

Shigeki Mori

A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 10to 10(&#x3a9;&#xb7;cm) necessary for a Johnsen-Rahbek type electrostatic chuck.

Dielectric layer for electrostatic chuck and electrostatic chuck

A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO) phase and a spinel (MgAlO) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of AlO. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.

Composite ceramic body, and component member for semiconductor manufacturing apparatus

The invention provides a polycrystal magnesium oxide (MgO) sintered body which is capable of having a sintered density close to a theoretical density thereof. The MgO sintered body exhibits excellent mechanical properties and heat conductivity, while reducing contamination of an atmosphere due to gas generation. The invention also provides a production method for the sintered body. The polycrystal MgO sintered body has a unique crystalline anisotropy in which (111) faces are oriented along a surface applied with a uniaxial pressure at a high rate. The polycrystalline MgO sintered body is obtained by a method which includes the steps of: sintering an MgO raw material powder, having a particle size of 1 &#x3bc;m or less, under a uniaxial pressure and then subjecting the sintered powder to a heat treatment under an atmosphere containing 0.05 volume % or more of oxygen, at a temperature of 1273 K or more for 1 minute or more.

Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target

A WC-based composite ceramics sintered body consisting of 40 volume % to 90 volume % of WC including solid-solved oxygen represented by a chemical formula of WC O (where 0.005<y/x&plus;y<0.05), with the remainder being partially stabilized ZrO and inevitable impurities, wherein partially stabilized ZrO includes one or more of stabilizers selected from the group consisting of Y O , CeO and MgO. A prepared powder of raw material is held in an atmosphere containing oxygen in a temperature range of 200&deg; C. to 600&deg; C. for 0.1 hour to 3 hours to provide WC grains including solid-solved oxygen represented by a chemical formula of WC O (where 0.005<y/x&plus;y<0.05). Partially stabilized Zro including one or more of stabilizers selected from the group consisting of Y O , CeO and MgO is used as a phase for filling up the grain boundary of the WC grains. A ceramic sintered body capable of sufficiently fulfilling various properties, such as of Young's modulus, hardness, heat conductivity and electrical workability, which are required as materials for sliding parts, edged tools and dies can be obtained.

WC-base composite ceramic sintered compact

Alumina base ceramic sintered body and its manufacturing method

Silicon nitride type sintered bodies and method for producing the same

A material for thin film magnetic head slider particularly suited for high recording, which is obtained by sintering a mixture consisting essentially of:

Material for magnetic head substrate member

A magnetic head slider and a material for it which comprises a sintered body obtained by sintering a raw material powder composed of 65 to 90% by weight of ZrO.sub.2 component containing therein a stabilizer and the balance of Al.sub.2 O.sub.3 component, 2% by weight or below of which has been substituted with a binder. The stabilizer is Y.sub.2 O.sub.3, MgO or CeO and the binder is Y.sub.2 O.sub.3 or MgO.

Magnetic head slider and material therefor

A recording head slider comprises a slider body having a fluid bearing surface on a primary surface thereof and at least one transducer on at least one side of the slider body, the slider body being made of a sintered body produced by sintering a base composition consisting essentially of 10-40 percent by volume of silicon carbide and the balance being alumina. The base composition may comprise 0.2-10 percent by weight of sintering aids MgO, Y.sub.2 O.sub.3, ZrO.sub.2, CaO, Er.sub.2 O.sub.3 and Cr.sub.2 O.sub.3. This slider has high precision machinability and compatibility with recording media.

Recording head slider

An alumina base substrate material for recording heads, which comprises a densely sintered body consisting essentially of:

Alumina base substrate of recording head and process for the production

Growing community of inventors

Fukuoka, Japan

Mitsuyoshi Nagano