Tokyo Electron Limited

Seiwa Optical Co., Ltd.

Mitsuya Kawatsuki

Kiyoshi Tsuda

Shinji Akaike

Muneaki Tamura

Kenta Saiki

Isao Okazaki

Kazuhiko Koshimizu

A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.

Probe apparatus and probe method

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Tokyo, Japan

Mitsuya Kawatsuki