Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi High-tech Science Corporation (1 from 223 patents)
1 patent:
1. 11906899 - Mask defect repair apparatus and mask defect repair method