Mitsubishi Electric Corporation

Mitsuteru Shiba

Akifumi Suzuki

Provided are a correlation determination unit to set, as a first apparatus, one apparatus among a plurality of apparatuses, set, as a first quality value, a quality value indicating a quality of an intermediate product processed by the first apparatus, set, as a second apparatus, an apparatus among the plurality of apparatuses that belongs to a process prior to the process to which the first apparatus belongs, set, as a second quality value, a quality value of an intermediate product processed by the second apparatus and determine whether correlation exists between the first quality value and the second quality value; a set determination unit to determine, using a quality standard value BQ indicating a standard of quality of the intermediate product, whether the first apparatus and the second apparatus are a set of apparatuses for which a first error between the first quality value and the quality standard value BQ and a second error between the second quality value and the quality standard value BQ cancel each other out when it is determined that correlation exists between the first quality value and the second quality value; and a process plan generation unit to generate a process plan using the set of apparatuses.

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Tokyo, Japan

Mitsuteru Shiba