Shin-etsu Handotai Co., Ltd.

Mitsutaka Irago

Tadahiro Kato

Akitoshi Enari

[Object] An outer periphery polishing apparatus capable of polishing the edge of workpieces having different bevel angles is to be provided. [Solution] Edge polishing unitsA,B for polishing the front surface edge Ea and the rear surface edge Eb of the workpiece W each include a polishing member mounting structureto which a polishing memberis attached, a mounting structure support unitthat tiltably supports the polishing member mounting structure, a mounting structure angle adjustment mechanismthat adjusts a tilt angle of the polishing member mounting structure, a reciprocation support basethat supports the mounting structure support unitso as to move along a reciprocation line, a base support unitthat tiltably supports the reciprocation support base, a base angle adjustment mechanismthat adjusts the tilt angle of the reciprocation support baseso as to be parallel to the edge Eb of the workpiece W, and a pedestalthat supports the base support unitso as to allow positional correction in a vertical direction and a horizontal direction.

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Tokyo, Japan

Mitsutaka Irago