Shimadzu Corporation

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Denki Kabushiki Kaihsa

Mitsushi Kawao

Akira Yamada

Fusaoki Uchikawa

Shigeru Matsuno

Shoji Miyashita

Tatsushi Kawamoto

Naoki Yoshioka

In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method

Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method

Growing community of inventors

Hadano, Japan

Mitsushi Kawao