Maxell, Ltd.

Hitachi-lg Data Storage, Inc.

Hitachi High-tech Corporation

Hitachi Consumer Electronics Co., Ltd.

Mitsuru Nagasawa

Mayumi Matsushita

Satoshi Ouchi

Tomoto Kawamura

Kenichiro Yamada

Tatehito Usui

Kenichi Shimada

Kazuyoshi Yamazaki

Kunikazu Ohnishi

Toshiteru Nakamura

Shigeru Nakamoto

Soichiro Eto

Takeru Utsugi

Hiromichi Yamakawa

Kunikazu Onishi

A process of detecting a thickness of a film layer to be processed or a depth of etching by using a result of detection of a signal indicating intensity of interference light having a plurality of wavelengths formed by being reflected on a surface of a wafer at a plurality of time instants from when plasma is formed to when the etching is completed. A start time instant is detected by using an amount of change in the intensity of the interference light. Then, a remaining film thickness or the etching amount at an arbitrary time instant is detected from a result of comparing actual data indicating the intensity of the interference light at the arbitrary time instant during the processing after the start time instant with a plurality of pieces of data for detection of the intensity of the interference light obtained in advance and associated with values of the film thicknesses or the depths of etching.

Plasma processing method and plasma processing apparatus

A wearable information terminal that can be worn by a user is provided with: a main body; a display that is incorporated in the main body and includes a screen; a controller that is incorporated in the main body and executes display processing onto the screen; and an operation detector that detects input operation executed by the user with respect to the controller.

Wearable information terminal

To implement, when a plurality of patterns are included in a field of view during measurement of scattered light in spectral scatterometry, removal of an influence of a pattern outside a dimension (three-dimensional shape) management target from spectral reflection intensity in the field of view without modeling the pattern outside the dimension management target. A three-dimensional shape detection apparatusincludes a spectral reflection intensity measurement unit configured to measure spectral reflection intensity in a field of view of a light spot by irradiating a sampleas a target with the light spot, and detects a three-dimensional shape in the field of view of the light spot based on the measured spectral reflection intensity. The three-dimensional shape detection apparatus further has a spectral feature value calculation unit configured to calculate a spectral feature value in a first region in the field of view of the light spot in advance in an external control apparatusthereof, and an area ratio estimation unit configured to estimate an area ratio between an area of the first region in the field of view of the light spot and an area of a second region outside the first region in the field of view of the light spot.

Three-dimensional shape detection apparatus, three-dimensional shape detection method and plasma processing apparatus

It is an objective of this disclosure to protect a highly transparent hologram light guide plate from water vapor and ultraviolet ray, thereby suppressing deterioration of the hologram light guide plate even when employed in a head mount display used in outdoor environments. A hologram light guide plate according to this disclosure comprises a protection layer that protects a hologram layer and an intermediate layer that is placed between a glass layer and the protection layer, wherein the glass layer and the hologram layer form a transfer layer that transfers image light. The intermediate layer causes the image light to transfer only in the transfer layer in a section from an input area of the image light to an output area of the image light.

Hologram light guide plate with plurality of layers and head mount display using hologram light guide plate

A wearable information terminal that can be worn by a user is provided with: a main body; a display that is incorporated in the main body and includes a screen; a controller that is incorporated in the main body and executes display processing onto the screen; and an operation detector that detects input operation executed by the user with respect to the controller. The operation detector is disposed at a different position in the main body from the position of the screen.

A light information recording/reproducing apparatus can improve the optical efficiency of an optical system at the time of reproduction to thereby improve the reproduction transfer rate. An optical element (for example, an optical isolator), which removes a return light beam of a light beam, is arranged such that the light beam passes through the optical element at the time of recording information in an optical information recording medium and such that the light beam does not pass through the optical element at the time of reproducing information from the optical information recording medium.

Optical information recording/reproducing device

In an optical unit of a projective display device which projects light source light reflected by a DMD, one prism of TIR prisms has a first boundary surface which is arranged in parallel to an emission surface of the light source light of other prism at a predetermined distance and on which the light source light from other prism is incident and a second boundary surface which is provided to face the DMD and emits the light source light illuminating the DMD and on which reflected light from the DMD is incident. When a swinging angle of minute mirrors of the DMD is set as &#xb1;&#x3b8;, a refractive index of the prisms is set as n, an angle formed by the first boundary surface and the second boundary surface is set as &#x3b2;, and an emission angle of the light source light with respect to the DMD in the second boundary surface is set as &#x3b1;, the swinging angle &#x3b8;, the refractive index n, the angle &#x3b2;, and the angle &#x3b1; satisfy a predetermined relation.

Optical unit and projective display device

The projection display system has a light source unit where a first light source and a second light source respectively emitting a first and second wavelength or wavelength range of light are juxtapositionally arranged; a third light source emitting a third wavelength or wavelength range of light; an optical combiner device for combining the three wavelengths or wavelength ranges of light from the light sources; an optical device for averaging distributions of the wavelengths or wavelength ranges of light; an image display device for receiving the light transmitted through the optical device and forming image light responsive to a video signal; and a projector lens for projecting the image light onto a screen. At least two of the optical axes of the first, second, and third wavelengths or wavelength ranges of light which are incident on the optical device are not coincident with each other.

Growing community of inventors

Tokyo, Japan

Mitsuru Nagasawa