Nippon Pillar Packing Co., Ltd.

Teijin Pharma Limited

Mitsuru Kudari

Masanobu Ninomiya

Satoshi Fujiwara

Toshihiko Fuse

Kenji Takemasa

Makoto Ueda

A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (), through which open flow passages (), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages () while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members () is made of hydrophobic material () different in hardness from the other.

Rotary-valve and adsorption separation system

A mechanical non-contact gas seal including a rotary scaling ring and a stationary sealing ring that is engaged and held in an inner periphery of a seal case by means of O-rings so as to move in an axial direction thereof. The O-rings engage with the outer periphery of the stationary sealing ring and come in press contact with the inner periphery of the seal case to seal a gap between the stationary sealing ring and the seal case while allowing the stationary sealing ring to move in an axial direction. A resin coating of a thickness in the range of 5 to 100 &#x3bc;m is formed on the inner periphery of the seal case at least within a range in which the O-rings relatively move with the movement of the stationary sealing ring.

Mechanical seal

The present invention provides a static pressure type non-contact gas seal which, even when supply of seal gasto the space between sealing end surfacesandhas stopped unexpectedly, can be safely used with no possibility that the sealing end surfacesandcollide severely against each other and consequently the sealing end surfacesandare damaged or destructed. In this static pressure type non-contact gas seal, the seal gasis supplied to the space between the sealing end surfacesandfrom a seal gas passage, thereby generating an opening force that acts on the stationary sealing ringin a direction that the space between the sealing end surfacesandis opened. An annular-spaced back pressure chamberblocked by two O-ringsandis formed between the facing peripheral surfaces of a seal caseand the stationary sealing ring, to introduce the seal gasto be supplied to the seal gas passageinto the back pressure chamber, thereby generating a closing force that maintain the balance with the opening force, as a back pressure acting on the stationary sealing ring. A spring is not used as a means for generating the closing force.

Static pressure type non-contact gas seal

A balance ratio for a stationary seal ring is designed to allow a seal face to be opened when, with a rotary seal ring at standstill, steam of a predetermined pressure is supplied to an endo-fluid region while a sealing-fluid region is brought into an exhausting state. On the other hand, an O-ring constituting a secondary seal portion is retained by a groove formed in a flange portion of a seal case, thereby preventing a force on the O-ring from affecting the stationary seal ring even when the steam is supplied to the endo-fluid region.

Growing community of inventors

Sanda, Japan

Mitsuru Kudari