Jeol Ltd.

Other

Joel Ltd.

Mitsuru Koizumi

Hidetoshi Nishiyama

Masanobu Yamamoto

Setsuo Norioka

Mitsuo Suga

Naoki Date

Hiroshi Kawase

Gakuo Komatsubara

Jun Sasaki

Minoru Takeda

Yuichi Aki

Yoshihisa Miura

Etsuro Ogata

Shunji Takahashi

There is provided a control method for an electron microscope including a thermionic-emission gun of self-bias type using a fixed bias resistor, an accelerating voltage power supply supplying an accelerating voltage to the thermionic-emission gun, and an optical system for irradiating a specimen with an electron beam. The control method includes: obtaining a value of a load current which is a current passing through an accelerating voltage power supply; determining a filament height of the thermionic-emission gun based on the value of the load current; and setting a condition of the optical system based on the filament height.

Control method for electron microscope and electron microscope

A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.

Particle beam system

Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means for detecting a secondary signal produced from the sample in response to the beam irradiation, a partitioning plate for partially partitioning off the space between the film and the primary beam irradiation means in the vacuum chamber, and a vacuum gauge for detecting the pressure inside the vacuum chamber.

Apparatus and method for inspecting sample

A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).

Specimen holder, specimen inspection apparatus, and specimen inspection method

An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.

Inspection method and reagent solution

A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder

Bone metastasis and the efficacy of drugs in the treatment of malignant tumors such as breast cancer, prostatic cancer and lung cancer that cause the bone metastasis are diagnosed using a marker that reflects the activity of osteoblasts and a marker that reflects the action of osteoclasts.

Method for diagnosing bone metastasis of malignant tumor

An electron beam irradiation system has a pumping block at an end of a microscope column of electron optics. The system has the rotary stage, the microscope column for directing an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.

System and method for electron beam irradiation

An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad connected to a vacuum chamber containing an electron beam column and in a condition that the static pressure floating pad is attached to a subject to be irradiated without contacting, and an electron beam irradiating the subject to be irradiated through an electron beam path of the static pressure floating pad , whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad is separated from the subject to be irradiated. A vacuum seal valve including a piston to open and close the electron beam path is provided within the static pressure floating pad . When the static pressure floating pad is separated from the subject , the vacuum seal valve is structured to be activated to close the electron beam path so as to prevent the air from flowing into the vacuum chamber . In this structure, the vacuum seal valve is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

Growing community of inventors

Tokyo, Japan

Mitsuru Koizumi