Canon Kabushiki Kaisha

F. Tech Incorporation

Other

Honda Motor Co., Ltd.

E. Tech Incorporation

Mitsuru Inoue

Nobushige Korenaga

Kazunori Iwamoto

Eiji Osanai

Hiroshi Ito

Ryuichi Ebinuma

Hiroaki Takeishi

Kotaro Akutsu

Yoshimasa Fukushima

Shigeo Sakino

Katsumi Nagahori

Xiao Yu

Bing Liu

Hiroyuki Watanabe

Fumio Kikuchi

Kazuo Takahashi

Hiroshi Tsuji

Kazuya Ono

Eiji Sakamoto

Masaki Mizuochi

Yasuhiro Someda

Makoto Mizuno

Norio Saitou

Mahito Negishi

Masami Yonekawa

Ryo Nawata

Hideki Nogawa

Katsumi Asada

Yukio Tokuda

Toshiya Asano

Tadayuki Kubo

Michio Horikoshi

Yutaka Hozumi

Hirofumi Fujii

Junichi Midorikawa

Toshiaki Yamazaki

Jun Matsuike

Kiyoshi Horiuchi

A vehicular L-type suspension arm is provided in which a wheel support part is provided on one end part of an arm main body, and a first vehicle body side linking portion and a second vehicle body side linking portion are provided in an intermediate part and on the other end part thereof respectively, wherein an arm main body (A) includes an upper half body (AU) that is formed so as to have an inverted U-shaped cross-section and a lower half body (AL) that is formed by press forming a plate material in a shape that blocks the lower open end of the upper half body (AU) and is welded by welds (w) to inner faces of a pair of side wall partsof the upper half body (AU), at the other end part of the arm main body (A) the lower half body (AL) extends lengthwise further outward than the upper half body (AU), an upwardly facing cylindrical bush support part (P) is formed by burring integrally with the extended part (Ale) so that it is the second vehicle body side connecting portion (AF), and an outer peripheral face, close to the intermediate part of the arm main body (A), of the bush support part (P) is butt-welded to an outer end face of the upper half body (AU). Thus, the second vehicle body side connecting portion can be formed by a simple structure in which an extended part of a lower half body of the arm main body is merely subjected to burring.

Vehicular L-type suspension arm

A vehicular L-type suspension arm is provided in which a wheel support part is provided on one end part of an arm main body, and a first vehicle body side linking portion and a second vehicle body side linking portion are provided in an intermediate part and on the other end part thereof respectively, wherein an arm main body (A) includes an upper half body (AU) having an inverted U-shaped cross-section and a lower half body (AL) that blocks the lower open end of the upper half body (AU), a first vehicle body side linking portion (AF) is formed from front and rear support plates (SF, SR) each formed by press forming a plate material, these front and rear support plates (SF, SR) have base parts (SFa, Sra) that are integrally joined to each other, the base ends thereof being welded to an outside part of the arm main body (A), extremity parts (SFb, SRb) of the front and rear support plates (SF, SR) are arranged so as to be spaced from each other in the vehicle body fore-and-aft direction, and cylindrical bush support parts (P) are integrally formed with the extremity parts (SFb, SRb) by burring on the same axis. Thus, the first vehicle body side linking portion can be prepared at light weight and low cost while ensuring a sufficient cross-section with a joined two-piece structure.

A vehicular suspension arm is provided in which an arm main body () includes a main plate () press-formed as a main part of the arm main body and having a short cylindrical part (EB) provided integrally with one end by flanging, and a reinforcing plate (H) superimposed on one of upper and lower faces of the main plate () and reinforcing the main plate (). The reinforcing plate (H) has an eye-shaped head part (Ha) formed in an annular shape and arranged coaxially with the short cylindrical part (EB), and a tail part (Hb) extending integrally from the eye-shaped head part (Ha) along the longitudinal direction of the main plate (), is formed from a single plate material that is thicker than the main plate (), and has at least the tail part (Hb) welded to the main plate (). A bush press-fit portion (P) is formed from an inner peripheral face of the eye-shaped head part (Ha) and an inner peripheral face of the short cylindrical part (EB). This ensures that the cross-sectional shape of a transition section from the bush press-fit portion to the plate-type arm main body is adequate, thus enabling the rigidity and strength required for the transition section to be easily guaranteed and, furthermore, it becomes possible to meet a requirement for increasing the strength of the arm without specially increasing the space around the outer periphery of the bush press-fit portion.

Vehicular suspension arm

An exposure apparatus configured to expose a pattern of an original onto a substrate includes a wire electrode row that includes plural parallel wire electrodes, and that is opposed to the original, and a power source that applies an AC voltage to the plural wire electrodes, wherein the wire electrode row includes a first electrode group, and a second wire electrode group to which an AC voltage having a phase different from that of an AC voltage applied to the first electrode group is applied.

Exposure apparatus and original

An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.

Exposure apparatus and device manufacturing method

In a torsion beam suspension including: a pair of left and right trailing arms; a torsion beamproviding connection between the trailing arms; and gussetswhich are U-shaped in section and substantially triangular in plane view and which are welded to inner side surfaces of connecting portions between the trailing armsand the torsion beam, seat surfacesare formed by crushing at left and right opposite end portions of a rear wallof the torsion beam, the seat surfacesbeing offset forward from a general outer surface of the rear wallby an amount e larger than a plate thickness t of the gussets, and each gussetincludes an inner end edge portionsuperposed on an intermediate portion in a lateral direction of the seat surface, and upper and lower front edge portionsconnected by a weld Wto upper and lower portions of an outer surface of the torsion beam. Thus, in the torsion beam, an abrupt increase in torsional rigidity is suppressed in the gusset inner end portion without reducing strength of the torsion beam to alleviate stress concentration, thereby providing a torsion beam suspension having a high durability.

Torsion beam suspension

The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.

Positioning apparatus, exposure apparatus, and method for producing device

A substrate holding device has a substrate holding unit and supporting elements movable to protrude from a substrate-holding surface of the substrate holding unit. The substrate holding unit holds the substrate in a predetermined state with a first holding force after relative positions of the substrate and the substrate holding unit are adjusted while the supporting elements lift the substrate off the substrate-holding surface. Before the relative positions of the substrate and the substrate holding unit are adjusted, the substrate holding device holds the substrate with a second holding force that is smaller than the first holding force and includes a zero holding force. Thus, the substrate holding device is able to align and hold the substrate in a short time.

Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate

A stage system including a first fixed guide having a first guide surface being parallel to a first direction and a second direction being orthogonal to the first direction, a first movable guide to be guided by the first fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about a third direction being orthogonal to the first and second directions, the first movable guide extending in the second direction, a second fixed guide having a second guide surface being parallel to the first and second directions, a second movable guide to be guided by the second fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about the third direction, the second movable guide having a second guide extending in the first direction, and a movable member to be guided in the first and second directions by the first and second movable guides.

Stage system, exposure apparatus, and device manufacturing method

Opposite ends of a torsion beam are connected to left and right trailing arms, and a spindle which supports a wheel is secured to a spindle support plate which is welded to each of the left and right trailing arms. Bent flanges which are formed in the outer periphery of a body of the spindle support plate, are fitted to the outer periphery of the end of trailing arm and secured by welding. With this arrangement, thermal warp of the body of the spindle support plate which supports spindle can be prevented, and not only can the mounting precision of the spindle be improved, but also the thickness of the spindle support plate can be reduced to reduce the weight.

A vehicular suspension includes a trailing arm and a substantially plate-like lower arm. The trailing arm is pivotably supported at its front end on a vehicle body via an elastic joint and extends from the front end toward the rear of the vehicle body. The lower arm extends in the vehicle width direction with its inner end pivotably supported on the vehicle body and its outer end fixed to a rear part of the trailing arm. A flat first seating surface of an end plate welded to the rear end of the trailing arm is superimposed on a flat second seating surface provided at the outer end of the lower arm, and an inner periphery of a closed rectangular opening formed on the second seating surface is welded to the first seating surface by a weld. The second seating surface of the lower arm protrudes from a main body portion via a slant surface.

Vehicular suspension

An evacuation use sample chamber is constituted by a top table which is provided with a recessed portion disposed in a sample chamber main body and for mounting a sample and a groove portion surrounding the recessed portion; a stage which holds the top table and is displaceable in front and back, right and left and up and down directions together with the top table ; a sample chamber cover which covers above the sample chamber main body including the top table ; and an evacuation use pipe C which communicates with the groove portion and evacuates gas between the bottom face of the sample chamber cover and the top face of the top table including the sample . Thereby, an evacuation use sample chamber which performs a stable evacuation and keeps around a sample at a predetermined high vacuum and a circuit pattern forming apparatus which permits a highly accurate pattern drawing over the entire region of the sample are provided.

Evacuation use sample chamber and circuit pattern forming apparatus using the same

An electron beam lithography apparatus of the present invention prevents the electron beam trajectory from being affected by a leakage magnetic field from a permanent magnet which is used as a sample stage guide/driving mechanism. In this electron beam lithography apparatus, an air bearing guide is used as a sample stage guide mechanism, and the stage posture is held by attracting the stage floating on a surface plate to the surface plate side by the permanent magnet. To avoid the leakage magnetic field from the permanent magnet from affecting the electron beam irradiation position on the sample, the permanent magnet is magnetically shielded by a shield member. In addition, to reduce variations in magnetic field above the sample, which are generated when the shield member moves in a leakage magnetic field from the electron lens, another shield member is arranged under the electron lens.

Electron beam lithography apparatus

A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

Stage device, exposure apparatus, device manufacturing method and movement guidance method

A scanning type exposure apparatus includes a substrate stage for holding a substrate and for moving the substrate in at least one of a scanning direction and a rotational direction, an original stage for holding an original and for moving the original in at least one of the scanning direction and the rotational direction, an optical system for transferring a pattern of the original onto the substrate, and a controller for controlling movements of the substrate stage and the original stage. The controller synchronously controls the substrate stage and the original stage in the scanning direction, and independently controls the substrate stage and the original stage in the rotational direction.

Growing community of inventors

Tochigi, Japan

Mitsuru Inoue