Ushio Denki Kabushiki Kaisha

Other

Mitsuru Ikeuchi

Akihiro Shimizu

Tomoyoshi Arimoto

Yukiharu Tagawa

Yukihiro Morimoto

Hiromitsu Matsuno

Tetsuji Arai

Kazuyuki Mori

Shoji Miyanaga

Hiroyuki Fujii

Yoichi Kono

Katsumi Shojo

Keisuke Okubo

Hiroyuki Fuji

Shouji Miyanaga

A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode comprises a main part made from tungsten and a tip end part made from thoriated tungsten, wherein thorium oxide particles having been peripherally coated with thorium are contained in the tip end part of said cathode.

Short arc type discharge lamp

A short arc type discharge lamp includes a cathode and an anode arranged inside an arc tube to face each other. The cathode comprises a main body portion made of tungsten and an emitter portion made of thoriated tungsten that is joined at the tip of the main body portion, where a metal oxide other than thorium (Th) is contained in the main body portion of the cathode, and a tungsten carbide layer is formed on the metal oxide.

A short arc type discharge lamp wherein a cathode and an anode are arranged opposite to each other in an interior of a light emitting tube and said cathode consists of a main body part with tungsten as the main constituent and an emitter part comprised of thoriated tungsten, wherein an oxygen content of the main body part of said cathode is lower than that of the emitter part, and band-shaped tungsten carbide is formed at the tip end face of the emitter part of said cathode.

A discharge lamp with excellent arc stability and excellent durability in which the use level of thoriated tungsten is restrained has an anode and a cathode in the interior of a discharge vessel, wherein said cathode is made up from a thoriated tungsten part with a tungsten filling ratio of at least 90 vol.-% and a main body part connected to said thoriated tungsten part and consisting of pure tungsten, wherein a ratio S/S of a side surface area Sof said thoriated tungsten part and a side surface area S of said cathode is in a range of from 0.005 to 0.15, with the proviso that, in case the cathode has a length in the direction of the cathode axis which exceeds twice the maximum diameter of the cathode, a side surface area S is used for calculating the ratio S/S which corresponds to the side surface area where the distance along the cathode axis from a tip end adjacent to the anode is twice the maximum diameter of the cathode.

Discharge lamp with an improved cathode of the type having a thoriated tungsten part

The present high-load and high-intensity discharge lamp includes a cathode made of a material which does not (substantially) include thorium but can be used as a cathode material of high heat load, so that a long lifetime and high stability corresponding to those of thoriated-tungsten can be realized. Specifically, the cathode is made of a metal base having a high melting point which mainly consists of tungsten and includes a coexisting substance in which an oxide of at least one kind of metal selected from lanthanum, cerium, yttrium, scandium, and gadolinium and an oxide of at least one kind of metal selected from titanium, zirconium, hafnium, niobium, and tantalum are coexistent. The conversion grain size of the coexisting substance is 15 &#x3bc;m or greater, and the plurality of coexisting substances are present in the metal base with a high melting point.

High-load and high-intensity discharge lamp

A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.

Discharge lamp having an electrode body with a hermetically sealed space that is partially filled with a heat conductor

High pressure discharge lamp of the short arc type

An EUV radiation source comprises a first electrode having a first through hole, a second electrode having a second through hole, a movable insulator, having a plurality of third through holes, provided between the first and second electrodes, wherein actuating gas is introduced in the first, second through holes and one of the plurality of third through holes, and voltage is impressed between the first and second electrodes when the first, second and plural through holes are located on a common axis.

EUV radiation source

To provide a spot light-source device whose discharge envelope has high pressure resistance and that emits high brightness as a spot light source, a spot light-source device excited by electromagnetic energy has a lamp that with a discharge envelope made of translucent non-conducting material, an expansion part forming a discharge space, and a tube connected thereto, and a discharge concentrator having a front tip part which is supported by the tube without protruding from the discharge envelope and faces the interior of the discharge space of the expansion part, that intensifies concentration of the electric field in the discharge space and that concentrates discharge, an electromagnetic energy provision source that excites discharge in the discharge concentrator from outside of the lamp, a concave reflection mirror that reflects light from the lamp, and a container with a resonance window that creates electromagnetic energy resonance. The lamp and the concave reflection mirror are housed with the container, and the contain is constructed to prevent leakage of electromagnetic energy from an aperture that emits light collected light from the lamp and concave reflection mirror.

Spot light-source device excited by electromagnetic energy

To provide a lamp device that is a point light source, that withstands high pressure, and that produces high-intensity light, a high-frequency excitation point light source lamp device has been devised having a discharge vessel made of a transparent, non-conductive material and having an expanded part forming a discharge space and with tubules joined to the expanded part; at least one discharge concentrator, that concentrates the electrical field within the discharge space of the expanded part, which is supported in a tubule with an end within the discharge space; and a high-frequency supply external to the lamp for providing excitation energy that excites a discharge of the concentrator.

High-frequency excitation point light source lamp device

A cermet which contains an aluminum oxide component, a silicon dioxide component, a component for modifying the coefficient of linear expansion which is formed of a metal oxide other than aluminum oxide and silicon dioxide, and a metal component with a smaller coefficient of linear expansion than aluminum oxide. A ceramic discharge lamp which has a discharge vessel with an arc tube part and hermetically sealed tube parts, in which furthermore in the arc tube part there are a pair of discharge electrodes opposite one another, and in which a hermetically sealed arrangement is obtained by fritting-welding of hermetically sealing components with the hermetically sealed tube parts, in the hermetically sealed components the base parts of the upholding parts of the electrodes being inserted, on the tips of which the discharge electrodes are located, and in which the hermetically sealing components are formed of the above described cermet.

Cermet and ceramic discharge lamp

A ceramic lamp in which the hermetically sealing bodies of electrically conductive cermet are sealed to hermetically sealed tube portions of the lamp vessel with a sealing material is arranged and provided with material components designed to give the hermetically sealing portions a high reliability. In particular, a lamp of a translucent ceramic has a lamp vessel which has a bulb portion and hermetically sealed tube portions which are connected to the bulb portion, and electrically conductive supply components in the bulb portion which have base parts inserted into the hermetically sealed bodies of electrically conductive cermet, is improved by seal welding of the hermetically sealing bodies of electrically conductive cermet on the hermetically sealed tube portion with a sealing material so that a hermetically sealed arrangement is produced in which, in the border area between the sealing material and the hermetically sealing body, an intermediate layer is formed in which components of the electrically conductive cermet of the hermetically sealing body are intermixed with components of the sealing materials.

Ceramic lamp

To prevent corrosion of the sites where upholding parts of electrodes are attached and to easily effect exact positioning of the electrodes, in a discharge lamp in which the sealing tubes of a discharge vessel are sealed with sealing bodies of material with a gradient function which is formed from a dielectric powder of the same material as material of the discharge vessel and from a conductive powder, the upholding parts of the electrodes extend through axial openings which are formed in the sealing bodies and are attached and hermetically sealed on the outer faces of the sealing bodies by means of a solder or the like.

Discharge lamp

A high pressure mercury ultraviolet lamp with high dimensional accuracy in which the emitter material during lamp operation is prevented from spraying and being deposited on the wall of the discharge vessel and the UV radiation transmission factor is prevented from being reduced is achieved by the fact that at least one of a group of halides which consists of halides of yttrium, lanthanum, cerium, dysprosium, gadolinium and thorium and at least one of a group of halides which consists of halides of alkali metal elements are filled at a filling ratio in the range from 1:4 to 1:20 to one another as a molar fraction. This also yields the same action as the application of emitter material to the upholding parts of the electrodes. Furthermore, high dimensional accuracy can be ensured by the measure by which the discharge vessel is made of a translucent ceramic, such as YAG.

High pressure mercury ultraviolet lamp

A method for annealing semiconductors wherein a semiconductor wafer is placed on a table and a plurality of flash discharge lamps are disposed in a plane parallel and adjacent to the semiconductor wafer. A plane mirror is disposed in a plane parallel and adjacent to the plane of the flash discharge lamps on the side opposite from the table. The semiconductor wafer is exposed to irradiation by light from the flash discharge lamps, whereby the wafer is instantaneously annealed uniformly over the entire area thereof.

Growing community of inventors

Himeji, Japan

Mitsuru Ikeuchi