Kokusai Electric Corporation

Mitsuru Fukuda

Kazuhide Asai

Hiroyuki Iwakura

Kazuyoshi Yamamoto

Kayoko Yashiki

Hidemoto Hayashihara

Takayuki Kawagishi

Risa Hosokawa

There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare the first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.

Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium

There is provided a configuration at least including a screen control part configured to display on a display part a maintenance component management screen displaying a component, a mechanism, or both, as a maintenance component, a collection part configured to collect component data related to the maintenance component, a determination part configured to compare a cumulative value of the component data with a predetermined threshold value to determine the cumulative value exceeding the threshold value, a calculation part configured to calculate a replacement time, and an operation part configured to calculate replacement times based on an average value of the component data and a cumulative value of the component data for each predetermined cycle, display the maintenance component sequentially from the maintenance component reaching the earliest replacement time, and display the maintenance component on the display part in a state where the component data is updated for the predetermined cycle.

Substrate processing apparatus and controller

There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.

Substrate processing apparatus and non-transitory computer-readable recording medium

Growing community of inventors

Toyama, Japan

Mitsuru Fukuda