Other

Kabushiki Kaisha Watanabe Shoko

Kabushiki Kaisha Motoyamaseisakusho

Toda, Masayuki

Kusuhara, Masaki

Umeda, Masaru

Mitsuru Fukagawa

Masaru Umeda

Masayuki Toda

Masaki Kusuhara

Osamu Uchisawa

Yoichi Kanno

Mikio Doi

Kohei Yamamoto

Toshikatu Meguro

Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

Evaporation method and film deposition method

Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus

Disclosed is a vaporizer constituted of a dispersing sectionand a vaporizing section. The dispersing sectioncomprises a gas introduction portfor introducing a carrier gasunder pressure into a gas passage, means for feeding raw material solutionsandto the gas passage, and a gas outletfor delivering the carrier gas containing the raw material solutions to the vaporizing section. The vaporizing sectioncomprises a vaporizing tubehaving one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outletof the dispersing section, and heating means for heating the vaporizing tube. The vaporizing sectionserves to heat and vaporize the raw material solution containing carrier gasdelivered from the dispersing section. The dispersing sectionincludes a dispersing section bodyhaving a cylindrical hollow portion, and a rodhaving an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rodhas a spiral grooveformed in the external periphery closer to the vaporizing section, the rod ibeing inserted into the cylindrical hollow portion.

Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD

A vaporizer has gas passage formed inside of main body of a dispersion part, a gas inlet opening to introduce pressurized carrier gas into gas passage, a part to supply raw materials solution to carrier gas passing gas passage, a gas outlet to send carrier gas including dispersed raw material solution to vaporization part, a dispersion part to flow through gas passage having a part to cool, a vaporization pipe connected with a reaction part and gas outlet of dispersion part of the device, and a heater to heat vaporization pipe is provided, a vaporization part to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion having small hole for the outside of gas outlet is provided.

Vaporizer and various devices using the same and an associated vaporizing method

A vaporizer which can be used for extended time without blockage, and possible to stably supply raw materials to a reaction part. A gas passageis formed inside of main body of a dispersion part, a gas inlet openingis utilized to introduce a pressurized carrier gasinto gas passage, a supply sourceis utilized to supply raw material solutionto a carrier gas passing through gas passage. A vaporization pipeis connected with a reaction part and gas outletof dispersion partof the device, with a heaterto heat vaporization pipe, while a vaporization partis utilized to heat and vaporize the carrier gas where a raw material solution is dispersed.

Carburetor, various types of devices using the carburetor, and method of vaporization

Disclosed is a vaporizer constituted of a dispersing sectionand a vaporizing sectionThe dispersing sectioncomprises a gas introduction portfor introducing a carrier gasunder pressure into a gas passage, means for feeding raw material solutionsandto the gas passage, and a gas outletfor delivering the carrier gas containing the raw material solutions to the vaporizing sectionThe vaporizing sectioncomprises a vaporizing tubehaving one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outletof the dispersing sectionand heating means for heating the vaporizing tubeThe vaporizing sectionserves to heat and vaporize the raw material solution containing carrier gasdelivered from the dispersing sectionThe dispersing sectionincludes a dispersing section bodyhaving a cylindrical hollow portion, and a rodhaving an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rodhas a spiral grooveformed in the external periphery closer to the vaporizing sectionthe rodbeing inserted into the cylindrical hollow portion.

Disclosed is a vaporizer constituted of a dispersing section and a vaporizing section The dispersing section comprises a gas introduction port for introducing a carrier gas under pressure into a gas passage, means for feeding raw material solutions and to the gas passage, and a gas outlet for delivering the carrier gas containing the raw material solutions to the vaporizing section The vaporizing section comprises a vaporizing tube having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet of the dispersing section and heating means for heating the vaporizing tube The vaporizing section serves to heat and vaporize the raw material solution containing carrier gas delivered from the dispersing section The dispersing section includes a dispersing section body having a cylindrical hollow portion, and a rod having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod has a spiral groove formed in the external periphery closer to the vaporizing section the rod being inserted into the cylindrical hollow portion.

Growing community of inventors

Tokyo, Japan

Mitsuru Fukagawa