National Institute for Materials Science

Japan Electronic Materials Corporation

Japan As Represented by Director General of National Research Institute of Metals

Mitsuru Egashira

Takeshi Konno

Mikihiko Kobayashi

Kazumichi Machida

Norio Shinya

Atsuo Urata

Hiroshi Fudoji

Akira Ishida

It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probecomprises a columnar contact partwhich can come in contact with an electrodeof an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part, the contact partcomprises a base partand an expansion partbonded to an end of the base partin a width direction, and the expansion partis formed of a material having a thermal expansion coefficient higher than that of the base part

Bimetallic probe with tip end

A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.

Process for precise arrangement of micro-bodies

Growing community of inventors

Tsukuba, Japan

Mitsuru Egashira