Tokyo Electron Limited

Mitsuru Dohiwa

Hiroshi Nishikawa

Kippei Sugita

Kazushi Tahara

Kaoru Inaba

Hana Sasaki

Hikaru Fujiwara

Takashi Niinuma

A calibration method includes placing an LED light source having a given wavelength range inside a reference apparatus; acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source; storing the first data in a memory; placing the LED light source in a calibration target apparatus; acquiring second data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in the stages by changing the light amount output from the LED light source; and calculating a calibration formula based on the first data stored in the memory and the second data.

Calibration method and calibration system

A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for a manufacturer is connected via a communication network to the first computer, and has a database provided therein which includes a list having fields for a plurality of kinds of management data for the apparatus component parts in association with each of ID numbers of the apparatus component parts. In the second computer, the management data on the apparatus component parts is acquired from the first computer via the communication network, and the acquired management data is compared with management data within the database.

Parts management system and method and parts management program and storage medium

Growing community of inventors

Nirasaki, Japan

Mitsuru Dohiwa