Seiko Instruments Inc

Mitsuo Yarita

Kenji Kato

Minoru Sudou

Takeshi Uchiyama

Akira Egawa

Masahiro Nakajima

Junji Taira

Minoru Sudo

Hiroyuki Tokita

Tomohiro Shimada

A dynamic amount sensor has a detecting circuit that detects a change in an electrostatic capacitance of each of electrostatic capacitance elements comprised of a movable electrode and a fixed electrode. A switching circuit switches the detecting circuit to first and second connecting states that detect changes in the electrostatic capacitance of the electrostatic capacitance elements in accordance with a change in an attitude of the movable electrode in corresponding first and second detecting axes directions. In the first and second connecting states, the detecting circuit includes circuits formed by connecting the electrostatic capacitance elements in series which change electrostatic capacitances symmetrically along with inclination of the movable electrode in the corresponding first and second detecting axes directions. A carrier wave applying circuit applies carrier waves whose phases are inverted from each other by 180&#xb0; to the electrostatic capacitance elements which are connected in series in the first and second connecting states of the detecting circuit.

Dynamic amount sensor

An angular velocity sensor amplifies a plurality of detection signals using one amplifying circuit and separates these detection signals after amplification. The angular velocity sensor detects displacements of a mass in the axial directions using x-, y- and z-axis detection circuits. A carrier wave whose phase is shifted 90&#xb0; from that of a carrier wave of the z-axis detection circuit is applied to the x- and y-axis detection circuits and outputs of the axis detection circuits are collectively inputted to a current/voltage conversion circuit which outputs a combined signal to three synchronous detection circuits that separate the signal into x-, y- and z-axis detection signal components. In the synchronous detection circuits, by applying phase division processing to the combined signal, the z-axis detection signal component is separated from cross axis detection signal components and by applying time division processing to the signal components based on switching timing of the carrier wave, the x- and y-axis detection signal components are separated from each other.

Angular velocity sensor having one amplifying circuit for amplifying plural detection signals

A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one another but not mechanically isolated from one another are formed to connect both electrodes.

Capacitive dynamic quantity sensor and semiconductor device

A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a respective one of the first and second substrates. Each of the first and second electrodes has through-holes formed in a portion thereof. A third substrate is disposed between and connected to the main surface of each of the first and second substrates. A vibration member is mounted on the third substrate so as to confront the first and second electrodes with gaps therebetween. The vibration member is mounted on the third substrate to undergo vibrational movement in response to application of an acceleration or an angular velocity to the vibration member so that the capacitance type dynamic quantity sensor detects a dynamic quantity in accordance with a change in capacitance between the first and second electrodes due to vibrational movement of the vibration member.

Capacitance type dynamic quantity sensor

A CV conversion circuit capable of measuring a plurality of capacitances with a simple circuit is provided. A time-division signal is applied to each capacitor, whereby a plurality of capacitances of the capacitors can be measured in series by a circuit with a small number of components.

Current-voltage conversion circuit

A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to the dynamical quantity. The semiconductor substrate is sandwiched between glass substrates on which fixed electrodes are disposed in a position facing the weight with minute gaps existing between the glass substrates and the weight. A substrate electrode is disposed on one of the glass substrates and contacts a part of the semiconductor substrate. A recess having a size equal to or larger than a contact area in which the semiconductor substrate contacts the substrate electrode is formed in the semiconductor substrate, and a contact electrode is disposed in the recess in contact with the substrate electrode.

Capacitive sensor for dynamical quantity

A universal optical connector adapter that can be used to connect optical connector plugs of the same or different types having ferrules fixed at ends of optical fibers. The universal adapter has first and second housings each having at one end a coupling portion for detachably coupling with an optical connector plug of a given type and on an opposite end a base plate having a reference plane. A cylindrical coupling member is rotatably held inward of the coupling portion of the first housing and incorporates a sleeve for fitting ferrules into opposite sides thereof. A male thread is provided on an outer periphery of the coupling cylindrical member and a female thread is provided in the coupling portion of the second housing on a side opposite to that in which an optical connector plug is coupled. The female thread is removably couplable with the male thread. The first and second housings can be coupled together so that the reference planes are closely contacted and the male thread and female thread are removable.

Universal adapter

To provide a ferrule tubular body and a ferrule which is free from a fear that the end face of the ferrule may be roughened, which can eliminate an eccentric adjustment process performed after an optical fiber is fixed, and which can attain the optical connection less in insertion loss. An indicator section or making it possible to observe an eccentric direction of a though-hole to which an exposed optical fiber end portion is inserted to be held is provided on the outer surface of a ferrule tubular body A, B, C, D and/or the outer surface of a flanged member A, B, C, D securely fixed to the rear end of the ferrule tubular body A, B, C, D.

Growing community of inventors

Chiba, Japan

Mitsuo Yarita