Hitachi, Ltd.

Mitsuo Tokuda

Muneyuki Fukuda

Hiroyasu Shichi

Kaoru Umemura

Satoshi Tomimatsu

Hidemi Koike

Hideo Kashima

Yasuhiro Mitsui

Tohru Ishitani

Eiichi Seya

Toru Otsubo

Junzou Azuma

Yasuhiro Yamaguchi

Ichirou Sasaki

Kazuhiro Ohara

Hirohisa Usuami

A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

Method and apparatus for specimen fabrication

An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.

Method and apparatus for processing a micro sample

Method and apparatus for processing a microsample

Growing community of inventors

Tachikawa, Japan

Mitsuo Tokuda