Canon Kabushiki Kaisha

The University of Electro-communications

Other

Hitachi, Ltd.

Nippon Shokenbai Co., Ltd.

Mitsuo Takeda

Nobuyoshi Tanaka

Kazuya Matsumoto

Hideyuki Tanaka

Takeshi Kato

Susumu Matsumura

Masakazu Kobayashi

Tomonori Tanoue

Naoki Ayata

Tohru Nakamura

Teruaki Yogo

Kentaro Nagai

Wei Wang

Yoko Miyamoto

Ruowei Gu

Tomoaki Yokozeki

Reika Ishijima

Yu Qiao

Michal Emanuel Pawlowski

Youhei Sakano

Nobuo Ishii

Disclosed is an imaging apparatus for generating data of a phase image based on an interference pattern acquired by a shearing interferometer, including: a differential phase data calculating unit that calculates first differential phase data expressing a change of a phase in a first direction and second differential phase data expressing a change of a phase in a second direction, based on interference pattern data generated by an electromagnetic wave transmitted through a subject; a second-order differential phase data calculating unit that calculates first second-order differential phase data by differentiating the first differential phase data in the first direction, and calculates second second-order differential phase data by differentiating the second differential phase data in the second direction; and a phase data calculating unit that calculates the phase image by solving a second-order differential equation including the first and second second-order differential phase data as functions.

Imaging apparatus and image processing method

A displacement detection method detects a displacement from phase singularities before and after the displacement, by specifying the phase singularities based on predetermined elements by acquiring the elements from a phase structure of the phase singularities, and detecting positions of the phase singularities after the displacement based on the elements acquired by specifying of the phase singularity.

Displacement detection method, displacement detection device, displacement detection program, phase singularity matching method and phase singularity matching program

Three-dimensional shape measuring instrument (white interferometer) for measuring the three-dimensional shape of an object to be measured by using white interference fringes, which detects the position where the amplitude of the white interference fringes takes on a maximum value with high accuracy in a short calculation processing time. An envelope distribution of the amplitude of the white interference fringes produced by the interference between the returning light from a reference mirror () and the returning light from an object () to be measured is determined, and an approximate position where the contrast of the white interference fringes is the highest is determined using this envelope distribution. The interference fringes of two or more different spectrum band components included in the white interference fringes are extracted, and the positions which are near the determined approximate position and at which the phases of the interference fringes of the different spectrum band components take on the same values are determined.

Three-dimensional shape measuring method and apparatus

Without using an interferometer, small displacement and/or three-dimensional shape of an object is detected in a noncontact way with high accuracy using pseudo-phase information calculated from e.g., a speckle pattern having a spatially random structure. A speckle image of the test object of the before displacement is obtained, and a spatial frequency spectrum is calculated by executing an N-dimensional Fourier transform for this. The complex analytic signal is obtained by setting the amplitude of frequency spectrum in the half plane including zero frequency in this amplitude distribution to zero, and executing the frequency spectrum amplitude in the half plane of the remainder in the inverse Fourier transform. And then, the amplitude value of this complex analytic signal is replaced with the constant value, a part of the obtained analytic signal domain is clipped, the phase information is calculated by the phase-only correlation function, and the cross-correlation peak in N-dimension is obtained. The displacement magnitude can be obtained by executing the above-mentioned method to the after displacement of the test object, and obtaining the difference of the cross-correlation peak before and after the displacement.

Method and apparatus for measuring small displacement

There are provided: compound semiconductor particles that can display more excellent performance in functions peculiar to the compound semiconductor (e.g. luminosity and luminescence efficiency); and a production process for obtaining such compound semiconductor particles with economy, good productivity, and ease. Compound semiconductor particles, according to the present invention, are characterized by comprising body particles and a metal oxide, wherein the body particles have particle diameters of smaller than 1 &#x3bc;m and are covered with the metal oxide and include a compound semiconductor including an essential element combination of at least one element X selected from the group consisting of C, Si, Ge, Sn, Pb, N, P, As, Sb, S, Se, and Te and at least one metal element M that is not identical with the element X, and wherein the metal oxide is a metal oxide to which an acyloxyl group is bonded.

Compound semiconductor particles and production process therefor

A three-dimensional shape measuring method by which measurement of a three-dimensional shape is realized with an improved precision. Grid patterns comprising a plurality of one-dimensional grids and , each having a period and direction different from those of the others, are simultaneously projected upon objects to be measured, using different colors for each of the one-dimensional grids and . Subsequently, a grid image deformed in accordance with the three-dimensional shapes of the objects to be measured is imaged, the grid image is separated by colors into one-dimensional grid components of each color, a phase for each of the one-dimensional grid components is detected, and then, measurement values of the three-dimensional shapes are obtained on the basis of the detected phases. At the same time, by imaging the objects to be measured by use of white light, color information on the objects to be measured are measured as well.

Three-dimensional shape measuring method

An integrated optical waveguide device includes a substrate, and an optical waveguide which is formed in the form of projection or is formed in a trench formed in the substrate. Each optical waveguide has a first optical area made of a first optical material and a second optical area which is made of a second optical material and is surrounded by the first optical area. The optical waveguides are arranged on both side faces of the projection or trench.

Integrated optical waveguide device

Film of a known refractive index whose thickness is to be measured is illuminated by a white light beam. Two wave fronts from both sides of the film are directed to an interferometer. The wave fronts are out of phase in accordance with the thickness of the film. The two wave fronts are amplitude-split, respectively, by the beam splitter of the interferometer. Two of the split wave fronts are tilted by tilting means in the interferometer. The other two split wave fronts, as well as the two tilted wave fronts, are directed to an interference surface. Thus, there is formed a white interference pattern on the interference surface. The white interference pattern has a middle peak and two side peaks. The space interval between these peaks is measured by a scanner. By knowing the peak-to-peak interval, it is possible to discriminate the space interval between both sides of the film.

Interferometric optical phase discrimination apparatus

This disclosure describes an apparatus for interferometrically measuring the physical properties of test object in which a test object having at least two surfaces and a substantial thickness is illuminated by a source of broadband light beam, each of plural wave fronts then formed and having an optical path difference therebetween is split by the transmission of the light beam or by the reflection of the light beam thereby, the split wave fronts are superposed each other respectively to form broadband light interference fringes and the physical properties such as thickness and refractive index of the test object are measured from the broadband light interference fringes, and which is especially provided with means for forming broadband light interference fringe by superposing the split wave fronts tilted to each other, while forming an image of said test object in the position where said interference fringe is formed.

Growing community of inventors

Hachioji, Japan

Mitsuo Takeda