Canon Kabushiki Kaisha

Mitsuo Nishimura

Hirofumi Fujii

Shinji Yamamoto

Takeshi Yamamoto

Nobuyuki Kojima

Takayuki Tsukimoto

Takao Mori

Kosuke Fujimoto

Shinichi Koreeda

An acoustic wave receiving apparatus is used, which includes: a holding member; a reception transducer array; a liquid vessel to which the reception transducer array is fixed and configured to store an acoustic matching liquid; a liquid supplying unit; a controlling unit configured to control a supplying rate of the acoustic matching liquid; and a scanning unit, wherein the controlling unit is configured to reduce the supply of the acoustic matching liquid into the liquid vessel when the reception transducer array detects an acoustic wave.

Acoustic wave receiving apparatus and control method thereof

A method of forming a container having a lid and a container body which define an inside space, and a material containing an organic compound provided in the inside space. The method includes forming a groove and a communication member for communicating the groove with an outside space, in at least one of the lid and the container body, providing the material in the inside space, welding the lid and the container body to each other, and exhausting the organic compound vaporized by welding heat to the outside space through the groove and the communication member.

Container and exposure apparatus having the same

A stage apparatus includes a movable stage; a magnetic unit including a first permanent magnet that is provided on the stage and magnetized in a direction perpendicular to a moving direction of the stage and at least one pair of second permanent magnets that are magnetized such that opposing portions of the first and second permanent magnets have the same pole. The magnetic unit applies a force to the stage in the moving direction thereof by placing the first permanent magnet between the pair of second permanent magnets. An actuator is configured to drive the second permanent magnets in the direction of magnetization. The force applied to the stage is varied by driving the actuator.

Stage apparatus

A positioning apparatus includes a beam which is driven in a first direction that is perpendicular to the longitudinal direction of the beam, a movable member which surrounds at least a part of the beam and moves with the beam moving in the first direction, an actuator which generates a force in the first direction between the beam and the movable member to control a positional relationship in the first direction between the beam and the movable member, and a position regulator arranged between the beam and the movable member and which regulates the positional relationship in the first direction between the beam and the movable member.

Positioning apparatus and exposure apparatus

A container including at least two structural members welded to each other to define an inside space, and a material containing an organic compound provided in the inside space, in which in at least one structural member of the at least two structural members has (i) a groove formed between a welded portion thereof and the material in order to release the organic compound, as the organic compound is vaporized when the structural members are welded to each other, and (ii) a communication member to communicate the groove and an outside space of the container with each other, so that the vaporized organic compound is exhausted to the outside space.

An exposure apparatus which can change a reticle efficiently with a simple arrangement is provided. When changing the reticle, a table is moved to a predetermined change operation position. At this time, a second magnet is retreated to a position where a repulsion force generated by a first magnet and the second magnet does not act on the table. After the reticle is changed, the second magnet is restored to a position where a repulsion force generating unit exerts a repulsion force upon the table.

Exposure apparatus, control method for the same, and device manufacturing method

A vibration wave driving apparatus includes a vibration member in which an electro-mechanical energy conversion element is fixed to an elastic member, and a contact member pressed against a sliding part provided in the vibration member, so as to be kept in contact therewith. The vibration wave driving apparatus is configured to supply alternating signals in a predetermined driving frequency band to the electro-mechanical energy conversion element, thereby generating a predetermined natural vibration mode in the elastic member to drive the contact member. In the apparatus, the natural vibration mode is generated in the elastic member, a natural frequency of another vibration mode different from the natural vibration mode is detected, and a stiffness of the support member is altered if the natural frequency of the other vibration mode detected is included in the driving frequency band.

Vibration wave driving apparatus, and method of setting shape of support member supporting elastic member forming vibration member of vibration wave driving apparatus

A vibration driven motor including a vibration member for generating a vibration therein as a driving force, and a contact member in press contact with the vibration member, wherein a vibration generated in the vibration member causes relative movement between the vibration member and the contact member. The vibration member includes an elastic contact portion, and the contact member includes an elastic contact portion in contact with the contact portion of the vibration member.

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Kawasaki, Japan

Mitsuo Nishimura